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SC1 세척공정을 이용한 고품질 Poly(3,4-ethylenedioxythiophene) 전극 패턴 어레이의 개발

Development of High-Quality Poly(3,4-ethylenedioxythiophene) Electrode Pattern Array Using SC1 Cleaning Process

  • 최상일 (배재대학교 나노고분자재료공학과) ;
  • 김원대 (배재대학교 나노고분자재료공학과) ;
  • 김성수 (배재대학교 나노고분자재료공학과)
  • Choi, Sangil (Department of Nano-Polymer Materials Engineering, Pai Chai University) ;
  • Kim, Wondae (Department of Nano-Polymer Materials Engineering, Pai Chai University) ;
  • Kim, Sungsoo (Department of Nano-Polymer Materials Engineering, Pai Chai University)
  • 투고 : 2011.11.25
  • 심사 : 2011.12.22
  • 발행 : 2011.12.30

초록

Application of self-assembled monolayers (SAMs) to the fabrication of organic thin film transistor has been recently reported very often since it can help to provide ohmic contact between films as well as to form simple and effective electrode pattern. Accordingly, quality of these ultra-thin films is becoming more imperative. In this study, in order to manufacture a high quality SAM pattern, a hydrophobic alkylsilane monolayer and a hydrophilic aminosilane monolayer were selectively coated on $SiO_2$ surface through the consecutive procedures of a micro-contact printing (${\mu}CP$) and dip-coating methods under extremely dry condition. On a SAM pattern cleaned with SC1 solution immediately after ${\mu}CP$, poly(3,4-ethylenedioxythiophene) (PEDOT) source and drain electrode array were very selectively and nicely vapour phase polymerized. On the other side, on a SC1-untreated SAM pattern, PEDOT array was very poorly polymerized. It strongly suggests that the SC1 cleaning process effectively removes unwanted contaminants on SAM pattern, thereby resulting in very selective growth of PEDOT electrode pattern.

키워드

참고문헌

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