참고문헌
- A. Uhlir, "Electrolytic shaping of germanium and silicon", Bell Synt. Tech. J., Vol. 35, p. 333, 1956. https://doi.org/10.1002/j.1538-7305.1956.tb02385.x
- D. R. Turner, "Electropolishing Silicon in Hydrofluoric Acid Solutions", J. Electrochem. Soc., Vol. 105, p. 402 1958. https://doi.org/10.1149/1.2428873
- Y. Arita, K. Kato, and T. Sudo, "The n+-IPOS scheme and its applications to IC's", IEEE T. Electron Dev., Vol. 24, p. 757, 1977. https://doi.org/10.1109/T-ED.1977.18817
- T. Unagami and K. Kato, "Study of the Injection Type IPOS Scheme", Jpn. J. Appl. Phys., Vol. 16, p. 1635, 1977. https://doi.org/10.1143/JJAP.16.1635
- K. Imai, "A new dielectric isolation method using porous silicon", Solid State Electron, Vol. 24, p. 159, 1981. https://doi.org/10.1016/0038-1101(81)90012-5
- F. Otoi, K. Anzai, H. Kitabayashi, K. Uchiho, and Y. Mizokami, "Fabrication of high speed 1 micron FIPOS/CMOS", J. Electrochem. Soc., Vol. 131, p. C319, 1984.
- L. T. Canham, "Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafers", Appl. Phys. Lett., Vol. 57, p. 1046, 1990. https://doi.org/10.1063/1.103561
- A. G. Cullis and L. T. Canham, "Visible light emission due to quantum size effects in highly porous crystalline silicon", Nature, Vol. 353, p. 335, 1991. https://doi.org/10.1038/353335a0
- Z. Sui, P. P. Leong, I. P. Herman, G. S. Higashi, and H. Temkin, "Raman analysis of light?emitting porous silicon", Appl. Phys. Lett., Vol. 60, p. 2086, 1992. https://doi.org/10.1063/1.107097
- C. Delerue, G. Allan, and M. Lannoo, "Theoretical aspects of the luminescence of porous silicon", Phys. Rev. B, Vol. 48, p. 11024, 1993. https://doi.org/10.1103/PhysRevB.48.11024
- F. Koch, V. Petrova-koch, T. Muschik, A. nikolov, and V. Gavrilenko, "Fast Photoluminescence from Porous Silicon", Mater. Res. Soc. Symp. Proc., Vol. 298, p. 319, 1993. https://doi.org/10.1557/PROC-298-319
- E. J. Lee, T. W. Bitner, J. S. Ha, M. J. Shane, and M. J. Sailor, "Light-Induced Reactions of Porous and Single-Crystal Si Surfaces with Carboxylic Acids", J. Am. Chem. Soc., Vol. 118, p. 5375, 1996. https://doi.org/10.1021/ja960777l
- J. M. Buriak and M. J. Allen, "Lewis Acid Mediated Functionalization of Porous Silicon with Substituted Alkenes and Alkynes", J. Am. Chem. Soc., Vol. 120, p. 1339, 1998. https://doi.org/10.1021/ja9740125
- A. Richter, P. steiner, F. Kozlowski, and W. Lang, "Current induced light emission from a porous silicon device", IEEE Electron Device Lett., Vol. 12, p. 691, 1991. https://doi.org/10.1109/55.116957
- K. D. Hirschmann, L. Tsybeskov, S. P. Duttagupta, and P. M. Fauchet, "Silicon-based visible light-emitting devices integrated into microelectronic circuits", Nature, Vol. 384, p. 338, 1996. https://doi.org/10.1038/384338a0
- C. Mazzoleni and L. Pavesi, "Application to optical components of dielectric porous silicon multilayers", Appl. Phys. Lett., Vol. 67, p. 2983, 1995. https://doi.org/10.1063/1.114833
- G. Smestad, M. Kunst, and C. Vial, "Photovoltaic response in electrochemically prepared photoluminescent porous silicon", Sol. Energy Mater. Sol. Cells, Vol. 26, p. 277, 1992. https://doi.org/10.1016/0927-0248(92)90047-S
- J. M. Lauerhaas and M. J. Sailor, "Chemical Modification of the Photoluminescence Quenching of Porous Silicon", Science, Vol. 261, p. 1567, 1993. https://doi.org/10.1126/science.261.5128.1567
- H. Sohn, S. Letant , M. J. Sailor, and C. Trogler, "Detection of Fluorophosphonate Chemical Warfare Agents by Catalytic Hydrolysis with a Porous Silicon Interferometer", J. Am. Chem. Soc., Vol. 122, p. 5399, 2000. https://doi.org/10.1021/ja0006200
- S. Letant and M. J. Sailor, "Molecular Identification by Time-Resolved Interferometry in a Porous Silicon Film", Adv. Mater., Vol. 13, p. 355, 2001. https://doi.org/10.1002/1521-4095(200103)13:5<355::AID-ADMA355>3.0.CO;2-D
- S. Chan, S. R. Horner, P. M. Fauchet, and B. L. Miller, "Identification of Gram Negative Bacteria Using Nanoscale Silicon Microcavities", J. Am. Chem. Soc., Vol. 123, p. 11797, 2001. https://doi.org/10.1021/ja016555r
- H. Sohn, R. M. Calhoun, M. J. Sailor, and W. C. Trogler, "Detection of TNT and Picric Acid on Surfaces and in Seawater by Using Photoluminescent Polysiloles", Angew. Chem. Int. Ed., Vol. 40, p. 2104, 2001. https://doi.org/10.1002/1521-3773(20010601)40:11<2104::AID-ANIE2104>3.0.CO;2-#
- H. Sohn, M. J. Sailor, D. magde, and W. C. Trogler, "Detection of Nitroaromatic Explosives Based on Photoluminescent Polymers Containing Metalloles", J. Am. Chem. Soc., Vol. 125, p. 3821, 2003. https://doi.org/10.1021/ja021214e
- X, Li, J. L. Coffer, Y. D. Chen, R. F. Pinizzotto, J. Newey, and L. T. Canham, "Transition Metal Complex- Doped Hydroxyapatite Layers on Porous Silicon", J. Am. Chem. Soc., Vol. 120, p. 11706, 1998. https://doi.org/10.1021/ja9823666
- N. Koshida, T. Nakajima, M. Yoshiyama, K. Ueno, T. Nakagawa, and H. Shinoda, "Ultrasound emission from porous silicon - Efficient thermoacoustic function as a depleted nanocrystalline system", Mater. Res. Soc. Symp. Proc., Vol. 536, p. 105, 1999.
- T. E. Bell, P. T. J. Gennissen, D. Demunter, and M. Kuhl, "Porous silicon as a sacrificial material", J. Micromech. Microeng., Vol. 6, p. 361, 1996. https://doi.org/10.1088/0960-1317/6/4/002
- V. G. Zubko, T. L. Smith, and A. N. Witt, "Detection of Extended Red Emission in the Diffuse Interstellar Medium", J. Astrophys., Vol. 498, p. 501, 1998.
- V. P. Parkhutik, E. Matveeva, R. Perez, J. Alamo, and D. Beltraan, "Mechanism of large oscillations of anodic potential during anodization of silicon in H3PO4/HF solutions", Mater. Sci. Engn. B, Vol. 69-70, p. 53, 2000. https://doi.org/10.1016/S0921-5107(99)00279-2
- V. P. Bondarenko, Y. V. Bogatirev, J. P. Colinge, L. N. Dolgyi, A. M. Dorofeev, and V. A. Yakovtseva, "Total gamma dose characteristics of CMOS devices in SOI structures based on oxidized porous silicon", IEEE. Trans. Nucl. Sci., Vol. 44, p. 1719, 1997. https://doi.org/10.1109/23.633424
- V. P. Parkhutik and L. T. Canham, "Derivatized Porous Silicon Mirrors: Implantable Optical Components with Slow Resorbability", Phys. Stat. Sol. A, Vol. 182, p. 591, 2000. https://doi.org/10.1002/1521-396X(200011)182:1<591::AID-PSSA591>3.0.CO;2-G
- R. L. Smith and S. D. Collins, "Porous silicon formation mechanisms", J. Appl. Phys., Vol. 71, p. R1, 1992. https://doi.org/10.1063/1.350839
- M. Christopersen, J. Carstensen, and H. Foll, "Parameter Dependence of Pore Formation in Silicon within a Model of Local Current Bursts", Phys. Stat. Sol. A, Vol. 182, p. 601, 2000. https://doi.org/10.1002/1521-396X(200012)182:2<601::AID-PSSA601>3.0.CO;2-9
- S. F. Chuang, S. D. Collins, and R. L. Smith, "Preferential propagation of pores during the formation of porous silicon: A transmission electron microscopy study", Appl. Phys. Lett., Vol. 55, p. 675, 1989. https://doi.org/10.1063/1.101819
- D. Brumhead, L. T. Canham, D. M. Seekings, and P. J. Tufton, "Gravimetric analysis of pore nucleation and propagation in anodised silicon", Electrochi. Acta., Vol. 38, p. 191, 1993. https://doi.org/10.1016/0013-4686(93)85128-L
- D. J. Bergman, "The dielectric constant of a composite material?A problem in classical physics", Phys. Rep. C, Vol. 43, p. 377, 1978. https://doi.org/10.1016/0370-1573(78)90009-1
- H. Looyenga, "Dielectric constants of heterogeneous mixtures", Physica, Vol. 31, p. 401, 1965. https://doi.org/10.1016/0031-8914(65)90045-5
- S. Brunauer, P. H. Emmett, and E. Teller, "Adsorption of Gases in Multimolecular Layers", J. Am. Chem. Soc., Vol. 60, p. 309, 1938. https://doi.org/10.1021/ja01269a023
- S. Sawada, N. Hamada, and N. Ookubo, "Mechanisms of visible photoluminescence in porous silicon", Phys. Rev. B, Vol. 49, p. 5236, 1994. https://doi.org/10.1103/PhysRevB.49.5236
- A. J. Read, R. J. Needs, K. J. Nash, L. T. Canham, P. D. J. Calcott, and A. Qteish, "First-principles calculations of the electronic properties of silicon quantum wires", Phys. Rev. Lett., Vol. 69, p. 1232, 1992. https://doi.org/10.1103/PhysRevLett.69.1232
- Y. Kanemitsu, H. Uto, Y. Masumoto, T. Futagi, and H. Mimura, "Microstructure and optical properties of free-standing porous silicon films: Size dependence of absorption spectra in Si nanometer-sized crystallites", Phys. Rev. B, Vol. 48, p. 2827, 1993. https://doi.org/10.1103/PhysRevB.48.2827
피인용 문헌
- Characterization and Surface-Derivatization of Porous Silicon vol.4, pp.3, 2011, https://doi.org/10.13160/ricns.2011.4.3.182
- Multiple-Bit Encodings of Bragg Photonic-structures by Using Consecutive Etch with Various Square Wave Currents vol.4, pp.3, 2011, https://doi.org/10.13160/ricns.2011.4.3.192
- Fabrication and Characterization of Free-Standing Silicon Nanowires Based on Ultrasono-Method vol.6, pp.3, 2011, https://doi.org/10.13160/ricns.2013.6.3.170
- Well Defined One-Dimensional Photonic Crystal Templated by Rugate Porous Silicon vol.6, pp.3, 2011, https://doi.org/10.13160/ricns.2013.6.3.183
- Preparation and Characterization of Flexible Optical Composite Films Based on Bragg-Structured Interferometer vol.6, pp.4, 2013, https://doi.org/10.13160/ricns.2013.6.4.244
- Fabrication and Characterization of Free-Standing DBR Porous Silicon Film vol.7, pp.1, 2014, https://doi.org/10.13160/ricns.2014.7.1.1