Journal of Integrative Natural Science (통합자연과학논문집)

The Basic Science Institute Chosun University (조선대학교 기초과학연구원)
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Chemical and Physical Properties of Porous Silicon

  • Received : 2010.03.02
  • Accepted : 2011.03.21
  • Published : 2011.03.31
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Abstract

The properties of porous silicon, such as substrate properties, porosity, thickness, refractive index, surface area, and optical properties of porous silicon were reviewed. Some properties, such as porosity, refractive index, thickness, pore diameter, multi-structures, and optical properties, are strongly dependent on the anodization process parameters. These parameters include HF concentration, current density, anodization time, and silicon wafer type and resistivity.

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References

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