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Tribological Characteristics of Si-Diamond-Like Carbon Films in a Condition with Carbon Nanotube Ink Lubricant

Carbon Nanotube 잉크 환경에서의 Si-Diamond-Like Carbon 박막의 내마모 특성

  • Jang, Kil-Chan (Dept. of nano Fusion Technology, Pusan National University) ;
  • Kim, Tae-Gyu (Dept. of nanomechatronics Engineering, Pusan National University)
  • 장길찬 (부산대학교 대학원 나노융합기술학과) ;
  • 김태규 (부산대학교 나노메카트로닉스공학과)
  • Received : 2010.12.31
  • Accepted : 2011.01.27
  • Published : 2011.03.27

Abstract

We investigated tribological characteristics of diamond-like carbon (DLC) in a condition with carbon nanotube (CNT) content of 1wt% in aqueous solution. Si-DLC films were deposited by radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) process on Al6061 aluminum alloy. In this study, the deposition of DLC films was carried out in vacuum with a chamber pressure of 10-5 to 10-3 Torr achieved by mechanical pump followed by turbo molecular pump. The surface adsorbed oxygen on the Aluminum substrates was removed by passing Ar gas for 10 minutes. The RF power was maintained at 500W throughout the experiment. A buffer layer of HMDSO was deposited on the substrate to improve the adhesion of DLC coating. At this point CH4 gas was introduced in the chamber using gas flow controller and DLC coating was deposited on the buffer layer along with HMDSO for 50 min. The thickness of 1 ${\mu}m$ was obtained for DLC films on aluminum substrates The tribological properties of as synthesized DLC films were analyzed by wear test in the presence of dry air, water and lubricant such as CNT ink.

Keywords

References

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