DOI QR코드

DOI QR Code

3D Computer Modeling on Phase Separated Porous Structure

상분리 다공 구조 형성에 대한 3차원적 컴퓨터 모델링

  • Kim, Dong-Uk (School of Advanced Materials Engineering, Kookmin University) ;
  • Byun, Ji-Young (Functional Materials Center, Korea Institute of Science and Technology) ;
  • Cha, Pil-Ryung (School of Advanced Materials Engineering, Kookmin University)
  • Received : 2011.03.04
  • Accepted : 2011.04.06
  • Published : 2011.04.28

Abstract

We developed a 3D simulation model of microstructure evolution of vertically aligned porous structure due to phase separation during film growth. The model proves its validity by reproducing the results of previous researches which are topological features of the microstructures and effects of varied processing parameters. The model will be extended by including bulk diffusion effect and elastic effect.

Keywords

References

  1. N. Yasui, A. Imada and T. Den: Appl. Phys. Lett., 83 (2003) 3347. https://doi.org/10.1063/1.1622787
  2. T. Thurn-Albrecht et al.: Science, 290 (2000) 2126. https://doi.org/10.1126/science.290.5499.2126
  3. Y. Cui, Q. Wei, H. Park and C. M. Lieber: Science, 293 (2001) 1289. https://doi.org/10.1126/science.1062711
  4. M. Bal, A. Ursache, M. T. Tuominen, J. T. Goldbach, and T. P. Russell: Appl. Phys. Lett., 81 (2002) 3479. https://doi.org/10.1063/1.1517400
  5. K. Fukutani, K. Tanji, T. Motoi and T. Den: Adv. Mater., 16 (2004) 1456. https://doi.org/10.1002/adma.200400268
  6. K. Fukutani, Y. Ishida, K. Tanji and T. Den: Thin Solid Films, 515 (2007) 4629. https://doi.org/10.1016/j.tsf.2006.11.192
  7. N. Yasui, R. Horie, Y. Ohashi, K. Tanji and T. Den: Adv. Mater., 19 (2007) 2797. https://doi.org/10.1002/adma.200700726
  8. M. Atzmon, D. A. Kessler and D. J. Srolovitz: J. Appl. Phys., 72 (1992) 442. https://doi.org/10.1063/1.351872
  9. C. D. Adams and D. J. Srolovitz: J. Appl. Phys., 74 (1993) 1707. https://doi.org/10.1063/1.354825
  10. J. Otomo, R. Kurokawa, H. Takahashi and H. Nagamoto: Vacuum, 81 (2007) 1003. https://doi.org/10.1016/j.vacuum.2006.12.007
  11. K. Fukutani, K. Tanji, T. Saito and T. Den: J. Appl. Phys., 98 (2005) 033507. https://doi.org/10.1063/1.1994942
  12. N. Moelans, B. Blanpain and P. Wollants: Calphad, 32 (2008) 268. https://doi.org/10.1016/j.calphad.2007.11.003
  13. J. W. Cahn and J. E. Hilliard: J. Chem. Phys., 31 (1959) 688. https://doi.org/10.1063/1.1730447