Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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On the Development of a Spatial Hybrid Visual Alignment System

3차원 하이브리드 비전 정렬 시스템에 관한 연구

  • 황재웅 (삼성전자) ;
  • 권상주 (한국항공대학교 항공우주기계공학부)
  • Received : 2011.11.10
  • Accepted : 2011.12.15
  • Published : 2011.12.31
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Abstract

In this paper, suggested is a hybrid-type visual alignment system to align mask and panel in 3-D space, where mask and panel are to be controlled independently by two individual positioning mechanisms in order to compensate for spatial misalignments. In the hybrid visual alignment system, the below 4-PPR parallel mechanism provides in-plain motions to pattern mask like the other conventional alignment systems while the above 4-RPS parallel mechanism is to move glass panel to achieve a complete spatial alignment. For the control of the hybrid alignment system, first, inverse kinematic solutions for the parallel mechanisms are given to determine the driving distance of each active joint, and also an efficient way to determine the spatial alignment error is developed by exploiting three in-plane cameras.

Keywords

References

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