Fabrication of Functional ZnO Nano-particles Dispersion Resin Pattern Through Thermal Imprinting Process

ZnO 나노 입자 분산 레진의 thermal imprinting 공정을 통한 기능성 패턴 제작

  • Kwon, Moo-Hyun (Department of Applied Chemistry, Woosuk Univ.) ;
  • Lee, Heon (Department of Materials Science and Engineering, Korea Univ.)
  • 권무현 (우석대학교 응용화학과) ;
  • 이헌 (고려대학교 신소재공학과)
  • Received : 2011.11.01
  • Accepted : 2011.11.11
  • Published : 2011.12.01

Abstract

Nanoimprint lithography is a next generation lithography technology, which enables to fabricate nano to micron-scale patterns through simple and low cost process. Nanoimprint lithography has been applied in various industry fields such as light emitting diodes, solar cells and display. Functional patterns, including anti-reflection moth-eye pattern, photonic crystal pattern, fabricated by nanoimprint lithography are used to improve overall efficiency of devices in that fields. For these reasons, in this study, sub-micron-scaled functional patterns were directly fabricated on Si and glass substrates by thermal imprinting process using ZnO nano-particles dispersion resin. Through the thermal imprinting process, arrays of sub-micron-scaled pillar and hole patterns were successfully fabricated on the Si and glass substrates. And then, the topography, components and optical property of the imprinted ZnO nano-particles/resin patterns are characterized by Scanning Electron Microscope, Energy-dispersive X-ray spectroscopy and UV-vis spectrometer, respectively.

Keywords

References

  1. Chou, S. Y., Krauss, P. R. and Renstrom, P. J., "Nanoimprint lithography," Journal of Vacuum Science and Technology B, Vol. 14, No. 6, pp. 4129-4133, 1996. https://doi.org/10.1116/1.588605
  2. Chou, S. Y., Krauss, P. R. and Renstrom, P. J., "Imprint of sub-25 nm vias and trenches in polymers," Applied Physics Letters, Vol. 67, No. 21, pp. 3114-3116, 1995. https://doi.org/10.1063/1.114851
  3. Byeon, K. J., Hwang, S. Y. and Lee, H., "Fabrication of two-dimensional photonic crystal patterns on GaNbased light-emitting diodes using thermally curable monomer-based nanoimprint lithography," Applied Physics Letters, Vol. 91, No. 9, Paper No. 091106, 2007. https://doi.org/10.1063/1.2776980
  4. Yang, K. Y., Yoon, K. M., Lim, S. W. and Lee, H., "Direct indium tin oxide patterning using thermal nanoimprint lithography for highly efficient optoelectronic devices," Journal of Vacuum Science and Technology B, Vol. 27, No. 6, pp. 2786-2789, 2009. https://doi.org/10.1116/1.3243170
  5. Han, K. S., Lee, H. J., Kim, D. H. and Lee, H., "Fabrication of anti-reflection structure on protective layer of solar cells by hot-embossing method," Solar Energy Materials and Solar Cells, Vol. 93, No. 8, pp. 1214-1217, 2009. https://doi.org/10.1016/j.solmat.2009.01.002
  6. Hong, S. H., Yang, K. Y. and Lee, H., "Sub-100nm Hybrid stamp fabrication by Hot embossing," Proceedings of the Korean Society of Precision Engineering Spring Conference, pp. 1168-1170, 2005.
  7. Jeong, J. H., Sim, Y. S., Sohn, H. and Lee, E. S., "UV-nanoimprint lithography using an elementwise patterned stamp," Microelectronic Engineering, Vol. 75, No. 2, pp. 165-171, 2004. https://doi.org/10.1016/j.mee.2004.04.003
  8. Byeon, K. J., Hong, E. J., Park, H. Y., Yang, K. Y., Baek, J. H., Jhin, J., Hong, C. H., Kim, H. G. and Lee, H., "Enhancement of the photon extraction of green and blue LEDs by patterning the indium tin oxide top layer," Semiconductor Science and Technology, Vol. 24, No. 10, Paper No. 105004, 2009. https://doi.org/10.1088/0268-1242/24/10/105004
  9. Yang, K. Y., Hong, S. H. and Lee H., "Fabrications of nano-sized patterns using bi-layer UV Nano imprint Lithography," Proceedings of the Korean Society for Precision Engineering Spring Conference, pp. 1489-1492, 2005.
  10. Xia, Y., Yang, P., Sun, Y., Wu, Y., Mayers, B., Gates, B., Yin, Y., Kim, F. and Yan, H., "One Dimensional Nanostructure," Advanced Materials, Vol. 15, No. 5, pp. 353-389, 2003. https://doi.org/10.1002/adma.200390087
  11. Aranovich, J. A., Golmayo, D., Fechrenbruch, A. L. and Bube, R. H., "Photovoltaic properties of ZnO/CdTe heterojunctions prepared by spray pyrolysis," Journal of Applied Physics, Vol. 51, No. 8, pp. 4260-4268, 1980. https://doi.org/10.1063/1.328243