Journal of the Korean Society of Manufacturing Technology Engineers (한국생산제조학회지)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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Design of a Condenser Lens System using a Thin Lens Combination

얇은 렌즈 조합을 이용한 집속 렌즈 시스템 설계

  • 임선종 (한국기계연구원, 나노융합시스템본부, 광응용기계연구실) ;
  • 최지연 (한국기계연구원, 나노융합시스템본부, 광응용기계연구실)
  • Received : 2011.08.19
  • Accepted : 2011.10.07
  • Published : 2011.10.15
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Abstract

Most of SEM is double condenser lens system. Two condenser lenses are required to provide the high demagnification ratios necessary for forming nanometer probes. The thin lens concept provides a highly useful basis for preliminary calculations in a broad range of situations. It is an easy way to understand the electron beam paths in column. Demagnification is easily calculated by this method. In this paper, we present design processes for condenser lens's demagnification by using thin lens combination model. Also, we verify the reliability of our design processes by comparing the modeled demagnification with these of corrected condenser lens.

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References

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