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롱 스트로크 정밀 스테이지용 원통형 리니어모터의 설계 및 운전 특성

Design and Operating Characteristics of Cylindrical Linear Motor for Long Stroke Precision Stage

  • 투고 : 2010.10.12
  • 심사 : 2010.11.30
  • 발행 : 2011.01.01

초록

This paper presents the design and operating characteristics of the novel cylindrical linear motor which is designed for the long stroke XY stage. In the long stroke structure, the air gap is changed by the distortion and bending effects, and it makes additional position error in the XY stage. In order to consider the distortion and bending effects of the long stroke, the field part of the cylindrical linear motor is designed as an open structure, and the stroke is supported by the bridge guide which is positioned in the open field part. The mechanical bridge guide can reduce the bending effects of the stroke and can keep a constant air gap. The detailed design process of the proposed cylindrical linear motor is presented in this paper. The proposed motor is analyzed by the 3D FEM technology. The practical XY stage which uses the proposed motor is tested to verify the propose novel cylindrical linear motor. The FEM and experimental results show the effectiveness of the proposed motor.

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참고문헌

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피인용 문헌

  1. Simulation and Test Study on Direct Force Control for Permanent Magnet Linear Synchronous Motor vol.8, pp.3, 2013, https://doi.org/10.4304/jcp.8.3.733-740
  2. Modeling Analysis and Parameters Calculation of Permanent Magnet Linear Synchronous Motor vol.8, pp.2, 2013, https://doi.org/10.4304/jcp.8.2.463-470