한국세라믹학회지 (Journal of the Korean Ceramic Society)

  • 제48권6호
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  • Pages.516-519
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  • 2011
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  • 1229-7801(pISSN)
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  • 2234-0491(eISSN)
한국세라믹학회 (The Korean Ceramic Society)
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Indium Tin Oxide (ITO) Coatings Fabricated using Nanoparticle Slurry and Sol

  • 투고 : 2011.10.10
  • 심사 : 2011.10.21
  • 발행 : 2011.11.30
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초록

Indium tin oxide (ITO) coatings were made using an ITO slurry and an ITO sol. This was achieved by dispersing nanosized ITO powder in a mixed solvent without any dispersant and developing an adhesive ITO sol from indium acetate and tin tetrachloride in a mixture of DMF and n-butanol. Coating was carried out in one step by spin coating an ITO slurry, which was then followed by an ITO sol over it. Here, the sol penetrates into the nano ITO particle layers to make them adhere to each other as well as to a glass substrate. This is then followed by sintering at 500$^{\circ}C$ for 1 h to produce a uniform film consisting of ITO particles of about 50 nm and 10 nm. ITO films were obtained with sheet resistances from 450 to 1500 ohm/${\Box}$ by varying spin speed and concentration. Transmittance is higher than 90% at 550 nm.

키워드

참고문헌

  1. R. Ota, S. Seki, M. Ogawa, T. Nishide, A. Shida, M. Ide, and Y. Sawada, "Fabrication of indium-tin-oxide films by dip coating process using ethanol solution of chlorides and surfactants," Thin Solid Films, 411 42-5 (2002). https://doi.org/10.1016/S0040-6090(02)00171-2
  2. E. Shigeno, K. Shimizu, S. Seki, M. Ogwa, A. Shida, M. Ide, and Y. Sawada, "Formation of indium-tin-oxide films by dip coating process using indium dipropionate monohydroxide," Thin Solid Films, 411 56-9 (2002). https://doi.org/10.1016/S0040-6090(02)00187-6
  3. S. Seki, Y. Sawada, and T. Nishide, "Indium-tin-oxide thin films prepared by dip-coating of indium diacetate monohydroxide and tin dichloride," Thin Solid Films, 388 22-6 (2001). https://doi.org/10.1016/S0040-6090(01)00847-1
  4. M. Toki and M. Aizawa, "Sol-gel formation of ITO thin Film from a Sol Including ITO Powder," J. Sol-gel Sci. Tech., 8 717-20 (1997).
  5. C. Goebbert, R. Nonninger, M. A. Aegerter, and H. Schmidt, "Wet chemical deposition of ATO and ITO coatings using crystalline nanoparticles redispersable in solutions," Thin Solid Films, 351 79-84 (1999). https://doi.org/10.1016/S0040-6090(99)00209-6
  6. R. Nonninger, C. Goebbert, H. Shmidt, R. Drumm, and S. Sepeur, "Method for Preparing Suspensions and Powders Based an Indium Tin Oxide and the use Thereof," Patent DE 19849048, 2000.
  7. S.-J. Hong and J.-I. Han, "Indium tin oxide (ITO) thin film fabricated by indium-tin-organic sol including ITO nanoparticle," Current Applied Physics, 6S1 e206-10 (2006). https://doi.org/10.1016/j.cap.2006.01.041,
  8. N. Al-Dahoudi and M. A. Aegerter, "Comparative study of transparent conductive $In_2O_3$ : Sn (ITO) coatings made using a sol and a nanoparticle suspension," Thin Solid Films, 502 193-7 (2006). https://doi.org/10.1016/j.tsf.2005.07.273

피인용 문헌

  1. Direct Patterning of Robust One-Dimensional, Two-Dimensional, and Three-Dimensional Crystalline Metal Oxide Nanostructures Using Imprint Lithography and Nanoparticle Dispersion Inks vol.29, pp.9, 2017, https://doi.org/10.1021/acs.chemmater.6b05398
  2. Structure deformation of indium oxide from nanoparticles into nanostructured polycrystalline films by in situ thermal radiation treatment vol.8, pp.1, 2011, https://doi.org/10.1186/1556-276x-8-428