Transactions of the Korean Society of Mechanical Engineers A (대한기계학회논문집A)

The Korean Society of Mechanical Engineers (대한기계학회)
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Parameter Selection for Condition Monitoring of LCD Conveyance Robot by Using Vibration Signals

진동신호를 이용한 LCD 반송로봇의 상태감시 파라미터 선정

  • Received : 2011.05.24
  • Accepted : 2011.11.10
  • Published : 2011.12.01
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Abstract

The purpose of this study is to perform parameter selection and develop a method for the condition monitoring of an LCD conveyance robot. To determine the vibration characteristics of the driving part of the robot, the gear mesh frequency (GMF) of the speed-reducing gearbox is calculated and confirmed by frequency analysis. In order to ensure reproducibility of the measured data, an appropriate working pattern is selected and experiments are carried out. For condition monitoring of the robot, a wireless measurement system is constructed and used in parameter selection, with the GMF as the center. A method involving the use of the standard deviation of the measured data and another method involving the use of multiple value of amplitude are proposed.

본 연구의 목적은 LCD 공정에서 사용되는 반송로봇의 상태감시 파라미터를 선정하고 이를 이용하여 상태감시 방법을 제안하는데 있다. LCD 반송로봇의 주행부 진동특성을 파악하기 위하여 주행부 감속기의 기어물림주파수(GMF)를 구하고, 주파수분석을 통해 이를 확인하였다. 취득데이터의 재연성을 확보하기 위하여 데이터 취득 운행 패턴을 선정하고 실험을 통해 재연성을 확인하였다. 무선데이터 취득 시스템을 구축하고 이를 이용하여 반송로봇의 상태를 감시하기 위한 기어물림 주파수를 중심으로 파라미터로 선정하였다. 취득된 데이터의 표준편차를 이용하는 상태감시 방법과 진폭의 배수를 이용하는 상태감시 방법을 제안하였다.

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References

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