Korean Journal of Metals and Materials (대한금속재료학회지)

The Korean Institute of Metals and Materials (대한금속재료학회)
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Sample Preparation for EBSD Analysis: Tips for Metals with Delicate Surfaces

표면처리가 어려운 금속재료의 EBSD 분석을 위한 시편 준비

  • Kang, Joo-Hee (Grain Structure Control Group, Korea Institute of Materials Science) ;
  • Kim, Su-Hyeon (Grain Structure Control Group, Korea Institute of Materials Science)
  • 강주희 (한국기계연구원 부설 재료연구소) ;
  • 김수현 (한국기계연구원 부설 재료연구소)
  • Received : 2010.03.22
  • Published : 2010.08.22
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Abstract

Aluminum, magnesium, titanium and high Mn steel are difficult to use in electron backscatter diffraction (EBSD) sample preparation due to the formation of an oxidation layer under conventional polishing. Alcohol-based polishing with colloidal silica suspension was introduced for these delicate samples. A hard particle-embedded sample was analyzed successfully using mechanical polishing. Ion-milling was effective in removing oxidized, deformed and transformed layers after mechanical polishing and was able to reduce artifacts significantly. The microstructure of a cross-section of a thin copper film was evaluated by attachment of a dummy to the film for mechanical polishing.

Keywords

Acknowledgement

Supported by : 재료연구소

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