대한금속재료학회지 (Korean Journal of Metals and Materials)

  • 제48권2호
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  • Pages.169-174
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  • 2010
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  • 1738-8228(pISSN)
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  • 2288-8241(eISSN)
대한금속재료학회 (The Korean Institute of Metals and Materials)
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SnO2-ZnO를 이용한 가스 센서의 포름알데히드 가스 감지특성

Formaldehyde Gas-Sensing Characteristics of SnO2-ZnO Materials

  • 윤진호 (서울시립대학교 신소재공학과) ;
  • 이회중 (서울시립대학교 신소재공학과) ;
  • 김정식 (서울시립대학교 신소재공학과)
  • Yoon, Jin Ho (Department of Materials Science and Engineering, The University of Seoul) ;
  • Lee, Hoi Jung (Department of Materials Science and Engineering, The University of Seoul) ;
  • Kim, Jung Sik (Department of Materials Science and Engineering, The University of Seoul)
  • 투고 : 2009.09.15
  • 발행 : 2010.02.20
⟨ 이전 논문 다음 논문 ⟩

초록

A micro gas sensor for formaldehyde (HCHO) gas was fabricated by using MEMS (Micro Electro Mechanical System) technology and the sol-gel process. The sensing materials of the $SnO_2$-ZnO system were synthesized by the sol-gel method. The crystal structure and thermal analysis of the $SnO_{2}$-ZnO were characterized by XRD and DSC-TGA. The fabricated gas sensors were tested at various gas concentrations (0.5~5.0 ppm) and different operation temperatures ($350{\sim}550^{\circ}C$). The $SnO_2$-10 mol%ZnO sensor showed the highest sensitivity ($R_s=0.24$) for 1.0 ppm-formaldehyde at $500^{\circ}C$ and response time (90% saturation time) was within 20 seconds.

키워드

과제정보

연구 과제 주관 기관 : 지식경제부

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