반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

유기 EL 성막 공정을 위한 점 증발원의 DSMC 시뮬레이션

DSMC Simulation of a Point Cell-source for OLED Deposition Process

  • 전성훈 (공주대학교 기계자동차공학부) ;
  • 이응기 (공주대학교 기계자동차공학부)
  • Jun, Sung-Hoon (Division of Mechanical & Automotive Engineering Kongju National University) ;
  • Lee, Eung-Ki (Division of Mechanical & Automotive Engineering Kongju National University)
  • 투고 : 2010.06.28
  • 심사 : 2010.07.31
  • 발행 : 2010.09.30
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초록

The performance of an OLED fabrication system strongly depends on the design of the evaporation cell-source. Therefore, necessity of the preceding study for cell source development of new concept is becoming increase. A development plan to substitute for experiment is applied as use simulation. In this study interpret behavior of a particle through DSMC techniques, and in this paper presenting a form to make so as to have better performance of the pointtype cell source which had a nozzle.

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참고문헌

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