Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Analysis of Polymer Carbonization using Lasers and its Applications for LCD Manufacturing Process

레이저를 이용한 폴리머 탄화현상 해석 및 LCD 제조공정에서의 응용

  • 안대환 (포항공과대학교 기계공학과) ;
  • 박병구 (포항공과대학교 기계공학과) ;
  • 김동언 (포항공과대학교 물리학과) ;
  • 김동식 (포항공과대학교 기계공학과)
  • Received : 2010.04.20
  • Accepted : 2010.05.07
  • Published : 2010.06.01
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Abstract

Laser carbonization of a polymer layer can be employed in various applications in the microelectronics industry, e.g repairing brightness pixels of an LCD panel. In this work, the process of thermal degradation of LCD color filter polymer by various laser sources with pulsewidths from CW to fs is studied. LCD pixels are irradiated by the lasers and the threshold irradiance of LCD color filter polymer carbonization is experimentally measured. In the numerical analysis, the transient temperature distribution is calculated and the number density of carbonization in the polymer layer is also estimated. It is shown that all the lasers can carbonize the polymer layers if the output power is adjusted to meet the thermal conditions for polymerization and that pulsed lasers can result in more uniform distribution of temperature and carbonization than the CW laser.

Keywords

References

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