한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제27권3호
  • /
  • Pages.18-26
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  • 2010
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  • 1225-9071(pISSN)
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  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

펨토초 레이저를 이용한 회절격자와 Fresnel Zone Plate 제작 및 광학적 분석

Optical Analysis of Diffraction Grating and Fresnel Zone Plate Fabricated on Fused Silica Glass by a Femtosecond Laser

  • 유진창 (조선대학교 공과대학 광기술공학과 레이저응용연구실) ;
  • 김진태 (조선대학교 공과대학 광기술공학과 레이저응용연구실) ;
  • 손익부 (광주과학기술원 고등광기술연구소 미세광학연구실)
  • Ryu, Jin-Chang (Department of Photonic Engineering, Chosun Univ.) ;
  • Kim, Jin-Tae (Department of Photonic Engineering, Chosun Univ.) ;
  • Sohn, Ik-Bu (Precision Optics Lab., Advanced Photonics Research Institute, GIST)
  • 발행 : 2010.03.01
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초록

Diffraction gratings with precise spatial periods of 2 ${\mu}m$ and 5 ${\mu}m$ have been fabricated by using a femtosecond laser which does not have limits on materials of micromachining and small thermal effects due to high peak power. Diffraction angle and diffraction efficiency of those were measured. Simulation results of diffraction angle and diffraction efficiency of the diffraction grating calculated with the parameters such as line width, depth, and spatial period of the fabricated gratings were compared with experimental results measured with a He-Ne laser. Besides these, Fresnel Zone Plates (FZPs) with focal distances of 50 mm and 25 mm were fabricated and focal distances of fabricated FZP were measured. Those experimental results for diffraction gratings and FZPs match well with experimental results.

키워드

참고문헌

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