Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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The Study of Micro Fabrication using Picosecond Laser Ablation

피코초 레이저 어블레이션을 이용한 미세 가공 연구

  • Noh, Ji-Whan (KIMM, Korea Institute of Machinery & Materials) ;
  • Sohn, Hyon-Kee (KIMM, Korea Institute of Machinery & Materials) ;
  • Suh, Jeong (KIMM, Korea Institute of Machinery & Materials) ;
  • Lee, Jae-Hoon (KIMM, Korea Institute of Machinery & Materials)
  • Published : 2010.02.01
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Abstract

The micro fabrication on the mold material using picosecond laser ablation processing has been studied. We used the two kind of system with picosecond laser. First one is two mirror type scanner and telecentric f-theta lens. Second one is X-Y stage and objective lens. By using these system, the $100{\mu}m$ size chess patterning and $2{\mu}m$ size patterning was fabricated. Especially $2{\mu}m$ size patterning on the mold material can be used as the decorative rainbow color logo for industrial field. In this paper, it is proved the picosecond laser is effective tool for the laser ablation processing.

Keywords

References

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