Journal of the Korean institute of surface engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
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Life Time Characteristics of OLED Device with AlOx Passivation Film Deposited by RF Magnetron Sputtering

RF 마그네트론 스퍼터링으로 증착된 AlOx 봉지 박막을 갖는 OLED 소자의 수명 특성

  • An, O-Jin (Department of Advanced Materials Science and Engineering, Daejin University) ;
  • Ju, Sung-Hoo (Department of Advanced Materials Science and Engineering, Daejin University) ;
  • Yang, Jae-Woong (Department of Advanced Materials Science and Engineering, Daejin University)
  • 안오진 (대진대학교 신소재공학과) ;
  • 주성후 (대진대학교 신소재공학과) ;
  • 양재웅 (대진대학교 신소재공학과)
  • Received : 2010.12.20
  • Accepted : 2010.12.30
  • Published : 2010.12.31
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Abstract

We investigated the life time characteristics of OLED device with aluminium oxide ($AlO_x$) passivation film on glass substrate and polyethylene terephthalate (PET) substrate by RF magnetron sputtering for the transparent barrier film applied to flexible OLED device. Basic buffer layer was determined as $Alq_3$(500 nm)-LiF(300 nm)-Al(1200 nm), and the most suitable aluminium oxide ($AlO_x$) film have been formed when the partial volume ratio of oxygen was 20% and the sputtering power was 100 watt and the minimum thickness of buffer was $2\;{\mu}m$. $AlO_x$/epoxy hybrid film was also used as a effective passivation layer for the purpose of improving life time characteristics of OLED devices with the glass substrate and the plastic substrate. Besides, the simultaneous deposition of $AlO_x$/epoxy film on back side of PET could result in better improvement of life time.

Keywords

References

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  1. Encapsulation Method of Flexible OLED Using SiNxand Metal Film vol.47, pp.3, 2014, https://doi.org/10.5695/JKISE.2014.47.3.099