Journal of the Korean institute of surface engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
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Syntheses and Mechanical Properties of Quaternary Cr-Si-O-N Coatings by Hybrid Coating System

하이브리드 코팅시스템에 의한 Cr-Si-O-N 코팅막 합성 및 기계적 성질

  • Lee, Jeong-Doo (School of Materials Science and Engineering, Pusan National University) ;
  • Wang, Qi Min (National Core Research Center for Hybrid Materials Solution, Busan National University) ;
  • Kim, Kwang-Ho (School of Materials Science and Engineering, Pusan National University)
  • 이정두 (부산대학교 재료공학과) ;
  • 왕치민 (부산대학교 하이브리드 소재 솔루션 국가핵심연구센터) ;
  • 김광호 (부산대학교 재료공학과)
  • Received : 2010.09.09
  • Accepted : 2010.10.30
  • Published : 2010.10.31
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Abstract

In the present work, the influence of oxide on the Cr-Si-N coatings was investigated for the Cr-Si-O-N coatings on AISI 304 and Si wafer deposited by hybrid system, which combines the DC magnetron sputtering technique and arc ion plating (AIP) using Cr and Si target in an $Ar/N_2/O_2$ gaseous mixture. As the O content in the Cr-Si-N coatings increased, the diffraction patterns of the Cr-Si-O-N coatings showed CrN and $Cr_2O_3$ phases. However, as the O content increased to 28.8 at.%, diffraction peak of $Cr_2O_3$ was disappeared in the Cr-Si-O-N coating. The $d_{200}$ value was decreased with increasing of O content. The average grain size increased from about 40 nm to 65 nm as the O content increased. The maximum micro-hardness of the Cr-Si-O-N coating was obtained 4507 Hk at the O content of 24.8 at.%. The average friction coefficient of the Cr-Si-O-N coatings was gradually decreased by increasing the O content and the average friction coefficient decreased from 0.37 to 0.25 by increasing the O content. These results indicated that amorphous phase was increased in the Cr-Si-O-N coatings by increasing of O content.

Keywords

References

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