Journal of Korean Institute of Industrial Engineers (대한산업공학회지)

Korean Institute of Industrial Engineers (대한산업공학회)
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Heuristics for Scheduling Wafer Lots at the Deposition Workstation in a Semiconductor Wafer Fab

반도체 웨이퍼 팹의 흡착공정에서 웨이퍼 로트들의 스케쥴링 알고리듬

  • Choi, Seong-Woo (Department of Business Administration, Hoseo University) ;
  • Lim, Tae-Kyu (Supply Planning Team, GS-Caltex Oil) ;
  • Kim, Yeong-Dae (Department of Industrial Engineering, Korea Advanced Institute of Science and Technology)
  • 최성우 (호서대학교 경영학과) ;
  • 임태규 (GS칼텍스 수급계획팀) ;
  • 김영대 (한국과학기술원 산업공학과)
  • Received : 2010.04.04
  • Accepted : 2010.05.18
  • Published : 2010.06.01
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Abstract

This study focuses on the problem of scheduling wafer lots of several product families in the deposition workstation in a semiconductor wafer fabrication facility. There are multiple identical parallel machines in the deposition workstation, and two types of setups, record-dependent setup and family setup, may be required at the deposition machines. A record-dependent setup is needed to find optimal operational conditions for a wafer lot on a machine, and a family setup is needed between processings of different families. We suggest two-phase heuristic algorithms in which a priority-rule-based scheduling algorithm is used to generate an initial schedule in the first phase and the schedule is improved in the second phase. Results of computational tests on randomly generated test problems show that the suggested algorithms outperform a scheduling method used in a real manufacturing system in terms of the sum of weighted flowtimes of the wafer lots.

Keywords

References

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