JSTS:Journal of Semiconductor Technology and Science

  • 제10권4호
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  • Pages.251-259
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  • 2010
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  • 1598-1657(pISSN)
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  • 2233-4866(eISSN)
대한전자공학회 (The Institute of Electronics and Information Engineers)
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Parameter Extraction Procedure for Ion Implantation Profiles to Establish Robust Database based on Tail Function

  • 투고 : 2010.05.25
  • 발행 : 2010.12.31
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초록

We proposed a tail function parameter extraction procedure for the establishment of a robust ion implantation database. We showed that, for the expression of ion implantation profiles, there are many local minimum values set for the third and fourth moment parameters of $\gamma$ and $\beta$ for the Pearson function that comprises the standard dual Pearson and tail functions. We proposed the use of a joined tail function as a mediate function to extract $\gamma$ and $\beta$, and demonstrated that this enables us to extract the parameters uniquely. Other parameters associated with channeling phenomena can also be simply and uniquely extracted by our procedure.

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참고문헌

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