Korean Chemical Engineering Research

The Korean Institute of Chemical Engineers (한국화학공학회)
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Adsorption Measurement of Thin Film Using a Quartz Crystal Resonator

수정진동자를 이용한 박막의 흡착 측정

  • 김병철 (동아대학교 화학공학과) ;
  • 박정우 (동아대학교 화학공학과) ;
  • 김영한 (동아대학교 화학공학과)
  • Received : 2010.02.11
  • Accepted : 2010.04.05
  • Published : 2010.06.30
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Abstract

A technique to measure the adsorption characteristic of surface area and pore size of a ceramic thin film is proposed, and its performance is examine. The thin film is fabricated directly on the resonator surface to measure the adsorption capacity of the film as it is, and using carbon dioxide makes the measurement easy. The results indicates that the measured surface area is satisfactory, while the pore size has some error. It is suggested that readily available carbon dioxide can be used to determine adsorption capacity of thin film at room temperature.

박막의 흡착특성인 흡착표면적과 세공크기를 수정진동자를 이용하여 측정하는 새로운 방법을 제안하였으며 그 성능을 조사하였다. 수정진동자의 표면에 박막을 직접 제조하여 흡착능을 측정함으로써 박막상태에서 흡착능을 측정하였으며, 이산화탄소를 피흡착 기체로 사용하여 측정이 용이하도록 하였다. 흡착측정 결과로부터 흡착면적은 양호하게 측정이 가능함을 알 수 있었으나, 세공크기의 측정에는 다소 오차가 발생하였다. 간단히 구할 수 있는 이산화탄소를 이용하여 상온에서 박막상태 흡착제의 흡착능 측정이 가능함을 제시하였다.

Keywords

References

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