Journal of the Korean Society of Manufacturing Process Engineers (한국기계가공학회지)

The Korean Society of Manufacturing Process Engineers (한국기계가공학회)
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Modeling and Motion Control of the Precision Positioning Stage with Flexible Hinge Mechanism

유연힌지형 정밀 스테이지의 모델링 및 운동제어

  • 김영식 (금오공과대학교 기계공학과) ;
  • 김재익 (금오공과대학교 기계공학부) ;
  • 김인수 (금오공과대학교 기계공학부)
  • Received : 2010.10.15
  • Accepted : 2010.12.09
  • Published : 2010.12.31
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Abstract

This paper suggests a control technique of the two axes precision stage. The stage is supported by four flexible spring hinges and driven by two piezoelectric actuators. The dynamic motion of the stage is analysed by the finite element method and identified by the frequency domain modeling technique based on the experimental data. The sliding mode control with integrator is applied to improve the tracking ability of the stage to the complex reference input signal. Experimental results demonstrate that the proposed modeling schemes and control algorithm can be used effectively for the two axes stage.

Keywords

References

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