Bulletin of the Korean Chemical Society

Korean Chemical Society (대한화학회)
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Synthesis of Li4Ti5O12 Thin Film with Inverse Hemispheric Structure

  • Lee, Sung-Je (Department of Material Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST)) ;
  • Jung, Kwang-Hee (Department of Material Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST)) ;
  • Park, Bo-Gun (Department of Advanced Materials Engineering, Kyonggi University) ;
  • Kim, Ho-Gi (Department of Material Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST)) ;
  • Park, Yong-Joon (Department of Advanced Materials Engineering, Kyonggi University)
  • Published : 2010.02.20
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Abstract

$Li_4Ti_5O_{12}$ thin film with inverse hemispheric structure was fabricated on a Pt/Ti/$SiO_2$/Si substrate by the sol-gel and dip coating method for use as an anode for 3-dimensional (3D) thin-film batteries. Polystyrene (PS) beads of 400 nm diameter were used to prepare the template for the inverse hemispheric structure. A coating solution prepared using precursor sources was dropped on the template-deposited substrates, which were then calcinated at $400^{\circ}C$. The template was removed by calcination, and the inverse hemispheric structure was successfully formed by an annealing process. The cyclic performance during high-rate charge/discharge processes of the $Li_4Ti_5O_{12}$ film with inverse hemispheric structure was superior to that of the flat $Li_4Ti_5O_{12}$ film.

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References

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