Journal of Korean Society for Atmospheric Environment (한국대기환경학회지)

Korean Society for Atmospheric Environment (한국대기환경학회)
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Development of a Plasma Waterjet Scrubber for the Reduction of PFCs

과불화탄소 제거를 위한 플라즈마 워터젯 스크러버 개발

  • Lee, Chae-Hong (Department Environmental Engineering.BK21 Team for Hydrogen Production, Chosun University) ;
  • Chun, Young-Nam (Department Environmental Engineering.BK21 Team for Hydrogen Production, Chosun University)
  • 이채홍 (조선대학교 환경공학부.BK21 바이오가스기반 수소생산 사업팀) ;
  • 전영남 (조선대학교 환경공학부.BK21 바이오가스기반 수소생산 사업팀)
  • Received : 2010.06.25
  • Accepted : 2010.10.06
  • Published : 2010.12.31
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Abstract

Perfluorocarbons (PFCs) are widely used in semiconductor industry. These gases need to be removed efficiently because of their strong absorption of infrared radiation and long atmospheric lifetimes which cause the global warming effect. To destruct $CF_4$, a waterjet gliding arc plasma was designed and manufactured. The highest $CF_4$ destruction showed at waterjet plasma case, compared to plasma discharge only or water scrubber only, respectively. In addition, it could be known that the $CF_4$ destruction should be associated with the electron and OH radicals. The operating conditions such as waterjet flow rate, initial $CF_4$ concentration, total gas flow rate, specific energy input were investigated experimentally using a plasma waterjet scrubber. Through the parametric studies, the highest $CF_4$ destruction of 94.5% was achieved at 0.2% $CF_4$, 2.1 kJ/L SEI, 20 L/min total gas flow rate and 18.5 mL/min waterjet flow rate.

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References

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