전기학회논문지 (The Transactions of The Korean Institute of Electrical Engineers)

  • 제59권1호
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  • Pages.108-112
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  • 2010
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  • 1975-8359(pISSN)
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  • 2287-4364(eISSN)
대한전기학회 (The Korean Institute of Electrical Engineers)
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DOE 법에 의한 Ga 첨가된 ZnO 박막의 공정조건 탐색

Process Optimization Approached by Design of Experiment Method for Ga-doped ZnO Thin Films

  • 이득희 (한국과학기술연구원 에너지재료연구단, 고려대학교 전기전자컴퓨터공학과) ;
  • 김상식 (고려대학교 전기전자전파공학부) ;
  • 이상렬 (한국과학기술연구원 에너지재료연구단)
  • 발행 : 2010.01.01
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초록

Design of experiment (DOE) method is employed for a systematic and highly efficient optimization of Ga-doped ZnO thin films synthesized by pulsed laser deposition (PLD) process. We sequentially adopted fractional-factorial design (FD) and central composite design (CCD) of the DOE methods. In fractional-FD stage, significant factors to make conductive electrode are found to target-substrate (T-S) distance and oxygen partial pressure. Moreover, correlation among the process factors is elucidated using surface profile modeling. Electrical properties of the GZO films grown on a glass substrate had been optimized to find that the lowest electrical resistivity of about $1.8'10^{-4}Wcm$ which was acquired with the T-S distance and the oxygen pressure of 4 cm and 7 mTorr, respectively. During the DOE-fueled optimization process, the transparency of the GZO films is ensured higher than 85 %.

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참고문헌

  1. R. F. Service, "Organic LEDs Look Forward to a Bright, White Future," Science 310, 1763, (2005)
  2. T. Minami, "New n-Type Transparent Conducting Oxides," MRS Bull. 25, 38, (2000)
  3. D. S. Ginley and C. Bright, "Epitaxial Transparent Conducting Oxide Films by PLD," MRS Bull. 25, 15, (2000)
  4. A. Suzuki, T. Matsushita, T. Aoki, Y. Yoneyama and M. Okuda, "Micro-Textured Milky ZnO:Ga Thin Films Fabricated by Pulsed Laser Deposition Using Second-Harmonic-Generation of Nd:YAG Laser," Jpn. J. Appl, Phys. Part 1 38, L71, (1999) https://doi.org/10.1143/JJAP.38.L71
  5. R. G. Gordon, "Criteria for Choosing Transparent Conductors," MRS Bull. 52, 15, (2000)
  6. J. Owen, M. S. Son, K-H. Yoo, B. D. Ahn, and S. Y. Lee, "Organic photovoltaic devices with Ga-doped ZnO electrode," Appl. Phys. Lett. 90, 033512, (2007) https://doi.org/10.1063/1.2432951
  7. L. Raniero, I. Ferreira, A. Pimentel, A. Goncalves, P. Canhola, E. Fortunato, and R. Martins, "Role of hydrogen plasma on electrical and optical properties of ZGO, ITO and IZO transparent and conductive coatings," Thin Solid Films 511, 295, (2006) https://doi.org/10.1016/j.tsf.2005.12.057
  8. S. Fujihara, A. Suzuki, and T. Kimura, "Ga-Doping Effects on Electrical and Luminescent Properties of ZnO:(La,Eu)OF Red Phosphor Thin Films," J. Appl. Phys. 94, 2411, (2003) https://doi.org/10.1063/1.1594817
  9. A. Segura, J. A. Sans, D. Errandonea, D. Martinez-Garcia, and V. Fages, "High conductivity of Ga-doped rock-salt ZnO under pressure: Hint on deep-ultraviolet-transparent conducting oxides," Appl. Phys. Lett 88, 011910, (2006) https://doi.org/10.1063/1.2161392
  10. S. J. Hong, and G. S. May, "Neural network-based real-time malfunction diagnosis of reactive ion etching using in situ metrology data," IEEE transaction on Semiconductor Manufacturing 17, 408, (2004) https://doi.org/10.1109/TSM.2004.831952
  11. J. H. Kim, B. D. Ahn, C. H. Lee, K. A. Jeon, H. S. Kang, and S. Y. Lee, "Effect of rapid thermal annealing on electrical and optical properties of Ga doped ZnO thin films prepared at room temperature," J. Appl. Phys, 100, 113515, (2006) https://doi.org/10.1063/1.2369544
  12. L. P. Ooijkaas, E. C. Wilkinson, J. Tramper, and R. M. Buitelaar, "Medium optimization for spore production of Coniothyrium minitans using statistically-based experimental designs," Biotechnol. Bioeng. 64, 92, (1999) https://doi.org/10.1002/(SICI)1097-0290(19990705)64:1<92::AID-BIT10>3.0.CO;2-8
  13. T. Lauinger, Jens Moschner, Armin G. Aberle, and Rudolf Hezel, "Optimization and characterization of remote plasma-enhanced chemical vapor deposition silicon nitride for the passivation of p-type crystalline silicon surfaces," J. Vac. Sci. Technol. A 16, 530, (1998) https://doi.org/10.1116/1.581095
  14. D. C. Montgomery, Design and Analysis of Experiments, Wiley, New York (2005)
  15. J. Haverkamp, R. M. Mayo, M. A. Bourham, J. Narayan, C. Jin, and G. Duscher, "Plasma plume characteristics and properties of pulsed laser deposited diamond-like carbon films," J. Appl. Phys. 93, 3627, (2003) https://doi.org/10.1063/1.1555695
  16. E. Fortunato, V.Assuncao, A. Goncalves, A. Marques, H. Aguas, L. Pereira, I. Ferreira, P. Vilarinho, and R. Martins, "High quality conductive gallium-doped zinc oxide films deposited at room temperature," Thin Solid Films 451, 443, (2004) https://doi.org/10.1016/j.tsf.2003.10.139
  17. P. R. Willmott, and J. R. Huber, "Pulsed laser vaporization and deposition," Rev. Mod. Phys. 72, 315, (2000) https://doi.org/10.1103/RevModPhys.72.315