The Transactions of the Korean Institute of Electrical Engineers P (전기학회논문지P)

The Korean Institute of Electrical Engineers (대한전기학회)
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Development of Hand-Held Type Sheet Resistance Meter Based on a Dual-Configuration Four-Point Probe Method

Dual-Configuration Four-Point Probe Method에 의한 휴대형 면저항 측정기 개발

  • Received : 2010.06.08
  • Accepted : 2010.09.14
  • Published : 2010.12.01
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Abstract

Portable sheet resistance-measuring instrument using the dual-configuration Four-Point Probe method is developed for the purpose of precisely measuring the sheet resistance of conducting thin films. While single-configuration Four-Point Probe method has disadvantages of applying sample size, shape and thickness corrections for a probe spacing, the developed instrument has advantages of no such corrections, little edge effects and measuring simply and accurately the sheet resistance between $0.2\Omega/sq$ and $2k\Omega/sq$.

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References

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