References
- Duenyas, I., J. W. Fowler, and L. W. Schruben, "Planning and scheduling in Japanese semiconductor manufacturing", Journal of Manufacturing Systems, Vol.13, 1994, 323-332. https://doi.org/10.1016/0278-6125(94)P2582-Y
- Fowler, J., G. L. Hogg, and D. T. Phillips, "Control of multiporduct bulk service diffusion/oxidation processes", IIE Transactions, Vol.24(1992), 84-96.
- Glassey, C. R. and M. C. G. Resende, "A scheduling rule for job release in semiconductor fabrication", Operations Research Letters, Vol.7(1988), 213-217. https://doi.org/10.1016/0167-6377(88)90033-8
- Glassey, C. R. and W. W. Weng, "Dynamic batching heuristic for simultaneous processing," IEEE Transactions on Semiconductor Manufacturing", Vol.4(1991), 77-82. https://doi.org/10.1109/66.79719
- Graves, S. C., H. C. Meal, D. Stefek, and A. H. Zeghmi, "Scheduling of re-entrant flow shops", Journal of Operations Management, Vol.3(1983), 1438-1483.
- Kim, Y-D., D-H. Lee, and J-U. Kim, "A simulation study on lot release control, mask scheduling, and batch scheduling in semiconductor wafer fabrication facilities", Journal of Manufacturing Systems, Vol.17(1998a), 107-117. https://doi.org/10.1016/S0278-6125(98)80024-1
- Kim, Y-D., J-U. Kim, S-K. Lim, and H-B. Jun, "Due-date based scheduling and control policies in a multiproduct semiconductor wafer fabrication facility", IEEE Transactions on Semiconductor Manufacturing, Vol.11(1998b), 155-164. https://doi.org/10.1109/66.661295
- Lee, Y. H., K. Bhaskaran, and M. Pinedo, "A heuristic to minimize the total weighted tardiness with sequence-dependent setups", IIE Transaction, Vol.29(1997), 45-52. https://doi.org/10.1080/07408179708966311
- Lin, J. T., F. K. Wang, and P. C. Kuo, "A parameterized-dispatching rule for a logic IC sort in a wafer fabrication", Production Planning and Control, Vol.16(2005), 426-436. https://doi.org/10.1080/09537280500110623
- Lou, S. X. C. and P. W. Karger, "A robust production control policy for VLSI wafer fabrication," IEEE Transactions on Semiconductor Manufacturing, Vol.2(1989), 159-164. https://doi.org/10.1109/66.44620
- Min, H. S. and Y. Yih, "Selection of dispatching rules on multiple dispatching decision points in real-time scheduling of a semiconductor wafer fabrication system", International Journal of Production Research, Vol.42(2003), 3932-3941.
- Robinson, J. K., J. W. Fowler, and J. F. Bard, "Use of upstream and downstream information in scheduling semiconductor batch operations", International Journal of Production Research, Vol.33(1995), 1849-1869. https://doi.org/10.1080/00207549508904785
- Uzsoy, R., C. Y. Lee, and L. A. Martian-Vega, "A review of production planning and scheduling models in the semiconductor industry. Part II : Shop-floor control", IIE Transaction, Vol.26(1994), 44-55.
- Yoon, H. J. and D. Y. Lee, "Deadlock-free scheduling of photolithography equipment in semiconductor fabrication", IEEE Transactions on Semiconductor Manufacturing, Vo.17(2004), 42-54. https://doi.org/10.1109/TSM.2003.822730
- Wein, L. M., "Scheduling semiconductor wafer fabrication", IEEE Transactions on Semiconductor Manufacturing, Vol.1(1988), 115-130. https://doi.org/10.1109/66.4384