Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Microstructure and Properties of Yttria Film Prepared by Aerosol Deposition

에어로졸 데포지션에 의한 이트리아 필름의 미세구조와 특성

  • Lee, Byung-Kuk (Functional Ceramic Materials Research Group, Functional Materials Division, Korea Institute of Materials Science) ;
  • Park, Dong-Soo (Functional Ceramic Materials Research Group, Functional Materials Division, Korea Institute of Materials Science) ;
  • Yoon, Woon-Ha (Functional Ceramic Materials Research Group, Functional Materials Division, Korea Institute of Materials Science) ;
  • Ryu, Jung-Ho (Functional Ceramic Materials Research Group, Functional Materials Division, Korea Institute of Materials Science) ;
  • Hahn, Byung-Dong (Functional Ceramic Materials Research Group, Functional Materials Division, Korea Institute of Materials Science) ;
  • Choi, Jong-Jin (Functional Ceramic Materials Research Group, Functional Materials Division, Korea Institute of Materials Science)
  • 이병국 (재료연구소 기능재료연구본부 기능세라믹그룹) ;
  • 박동수 (재료연구소 기능재료연구본부 기능세라믹그룹) ;
  • 윤운하 (재료연구소 기능재료연구본부 기능세라믹그룹) ;
  • 류정호 (재료연구소 기능재료연구본부 기능세라믹그룹) ;
  • 한병동 (재료연구소 기능재료연구본부 기능세라믹그룹) ;
  • 최종진 (재료연구소 기능재료연구본부 기능세라믹그룹)
  • Published : 2009.09.30
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Abstract

Dense crack-free yttria film with 10 $\mu m$ thickness was prepared on aluminum by aerosol deposition. X-ray diffraction pattern on the film showed that it contained the same crystalline phase as the raw powder. Transmission electron microscopy revealed a nanostructured yttria film with grains smaller than 100 nm. Tensile adhesion strength between the film and aluminum substrate was 57.8 $\pm$ 6.3MPa. According to the etching test with $CF_4-O_2$ plasma, the etching rate of the yttria film was 1/100 that of quartz, 1/10 that of sintered alumina and comparable to that of sintered yttria.

Keywords

References

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