Nuclear Engineering and Technology

  • 제41권5호
  • /
  • Pages.709-714
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  • 2009
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  • 1738-5733(pISSN)
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  • 2234-358X(eISSN)
한국원자력학회 (Korean Nuclear Society)
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CU+ ION EXTRACTION FROM A MODIFIED BERNAS ION SOURCE IN A METAL-ION IMPLANTER

  • Hong, In-Seok (Proton Engineering Frontier Project, Korea Atomic Energy Research Institute Nuclear physics, Fusion, and Laser technology) ;
  • Lee, Hwa-Ryun (Proton Engineering Frontier Project, Korea Atomic Energy Research Institute Nuclear physics, Fusion, and Laser technology) ;
  • Trinh, Tu Anh (Proton Engineering Frontier Project, Korea Atomic Energy Research Institute Nuclear physics, Fusion, and Laser technology) ;
  • Cho, Yong-Sub (Proton Engineering Frontier Project, Korea Atomic Energy Research Institute Nuclear physics, Fusion, and Laser technology)
  • 발행 : 2009.06.30
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초록

An ion implanter, which can serve as a metal-ion supply, has been constructed and performance tested. Copper ions are generated and extracted from a Bernas ion source with a heating crucible that provides feed gases to sustain the plasma. Sable arc plasmas can be sustained in the ion source for a crucible temperature in excess of $350^{\circ}C$. Stable extraction of the ions is possible for arc Currents less than 0.3 A. Arc currents increase with the induced power of a block cathode and the transverse field in the ion source. $Cu^+$ ions in the extracted beam are separated using a dipole magnet. A $20{\mu}A$ $Cu^+$ ion current can be extracted with a 0.2 A arc current. The ion current can support a dose of $10^{16}ions/cm^2$ over an area of $15\;cm^2$ within a few hours.

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참고문헌

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