The Transactions of The Korean Institute of Electrical Engineers (전기학회논문지)

The Korean Institute of Electrical Engineers (대한전기학회)
권호 표지

Chemical Mechanical Polishing Characteristics of CdTe Thin Films for Application to Large-area Thin Film Solar Cell

대면적 박막 태양전지 적용을 위한 CdTe 박막의 화학적기계적연마 공정 특성

  • 양정태 (한국폴리텍V대 금제캠퍼스 전기학과) ;
  • 신상헌 (조선대 공대 전기공학과) ;
  • 이우선 (조선대 공대 전기공학과)
  • Published : 2009.06.01
Download PDF
⟨ Previous Next ⟩

Abstract

Cadmium telluride (CdTe) is one of the most attractive photovoltaic materials due to its low cost, high efficiency and stable performance in physical, optical and electronic properties. Few researches on the influences of uniform surface on the photovoltaic characteristics in large-area CdTe solar cell were not reported. As the preceding study of the effects of thickness-uniformity on the photovoltaic characteristics for the large-area CdTe thin film solar cell, chemical mechanical polishing (CMP) process was investigated for an enhancement of thickness-uniformity. Removal rate of CdTe thin film was 3160 nm/min of the maximum value at the 200 $gf/cm^2$ of down force (pressure) and 60 rpm of table speed (velocity). The removal rate of CdTe thin film was more affected by the down force than the table speed which is the two main factors directly influencing on the removal rate in CMP process. RMS roughness and peak-to-valley roughness of CdTe thin film after CMP process were improved to 96.68% and 85.55%, respectively. The optimum process condition was estimated by 100 $gf/cm^2$ of down force and 60 rpm of table speed with the consideration of good removal uniformity about 5.0% as well as excellent surface roughness for the large-area CdTe solar cell.

Keywords

References

  1. 조은철, 조영현, 김동섭, 이수홍, 지일환, '실리콘 태양전지의 개발현황', 전기전자재료, Vol. 8, No. 3, pp.362-371, 1995
  2. 김경해, 이준신, '결정질 실리콘 태양전지 연구개발 동향', 전기전자재료, Vol. 20, No.4, pp. 39-46, 2007
  3. 유진수, 문상일, 김경해, Suresh Dhungel, 이준신, '실리콘 태양전지 최적설계에 관한 연구', 대한전기학회논문지:전기물성.응용부문C, Vol. 53, No.4, pp. 187-191, 2004
  4. 윤경훈, '박막 태양전지 기술개발 현황', 한국전기화학회, 전지기술심포지움 학술대회지, pp. 189-210, 2001
  5. 유진수, Kumar Dhungel, 이준신, '태양전지 응용을 위한 PECVD 실리콘 질화막 증착 및 열처리 최적화', 대한전기학회논문지:전기물성.응용부문C, Vol. 55, No. 12, pp. 565-569, 2006
  6. 윤재호, 안병태, 윤경훈, '화합물 박막 태양전지 기술동향', 전기전자재료, Vol. 19, No.7, pp. 29-38, 2006
  7. 이재형, 이호열, 박용관, '보론 도핑에 따른 CdS 박막 및 CdS/CdTe 태양전지 특성,대한전기학회논문지:전기물성. 응용부문C, Vol. 48, No.8, pp. 563-569, 1999
  8. 김동환, 윤세왕, '박막형 CdTe 태양전지' 전기전자재료, Vol. 11, No.8, pp. 60-64, 1998
  9. 최진영, 이임근, 정종진, 박성준, 이동윤, 김희제, '염료감응형 태양전지의 대면적화에 따른 셀 특성 연구', 한국신.재생에너지학회 춘계학술대회 논문집, pp, 189-191, 2005
  10. 최권우, 김남훈, 서용진, 이우선, '산화제 및 연마제 첨가를 통한 Nichel CMP 특성 개선 연구', 전기전자재료학회논문지, Vol. 18, No.7, pp. 605-609, 2005 https://doi.org/10.4313/JKEM.2005.18.7.605
  11. 서용진, 고필주, 박성우, 이강연, 이우선, '고집적 메모리 커패시터의 Vertical Sidewal Patterning을 위한 BTO 박막의 CMP 특성'. 대한전기학회논문지:전기물성.응용부문C,, Vol. 55, No.3, pp. 116-121, 2006
  12. 이재형, 최성현, 이동진, 이종인, 양동건, 양계준, 이준신, '스퍼터 압력에 따른 태양전지용 CdTe 박막의 구조적, 광학성 특성', 한국전기전자재료학회, 추계학술대회 논문집, pp. 101-102, 2005
  13. 정해원 이천, 신재혁, 신성호, 박광자, '스퍼터링에 의한 CdTe박막 제조조건이 CdTe/CdS 태양전지의 특성에 미치는 영향', 전기전자재료학회논문지, Vol. 10, No.9, pp. 930-937, 1997
  14. Nam-Hoon Kim, Sang-Hun Shin, Pil-Ju Ko, Woo-Sun Lee, 'Chemical mechanical polishing characteristics in (Bi,La)Ti3O12 damascene process for high-density ferroelectric memories', Thin Solid Films, Vol. 515, pp. 6456-6459, 2007 https://doi.org/10.1016/j.tsf.2006.11.176
  15. Nam-Hoon Kim, Min-Ho Choi, Sang-Yong Kim, Eui-Goo Chang, 'Design of experiment (DOE) method considering interaction effect of process parameters for optimization of copper chemical mechanical polishing (CMP) process,' Microelectronic Engineering, Vol. 83, Issue 3, pp. 506-512, 2006 https://doi.org/10.1016/j.mee.2005.11.016
  16. F. W. Preston, 'The theory and design of plate glass polishing machines', J. Soc. Glass Technol., Vol. 11, pp. 214-256, 1927
  17. J. Hernandez, P. Wrschka, Y. Hsu, T.-S. Kuan, G. S. Oehrlein, H. J. Sun, D. A. Hansen, J. King, M. A. Fury, 'Chemical Mechanical Polishing of Al and Si02 Thin Films: The Role of Consumables,' Journal of The Electrochemical Society, Vol. 146, Issue 12, pp. 4647-4653, 1999 https://doi.org/10.1149/1.1392688
  18. D. R. Evans, Chemical-Mechanical Planarization of Semiconductor Materials, 1st Edition, Heidelberg: Springer-Verlag, 2004