Journal of the Korean Vacuum Society (한국진공학회지)

The Korean Vacuum Society (한국진공학회)
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The Present Status of Development of Inductively Coupled Plasma Simulator based on Fluid Model

유체 모델을 기반으로 하는 유도 결합 플라즈마 시뮬레이터 개발 현황

  • Kwon, D.C. (Department of Electrical Engineering, Chungbuk National University) ;
  • Yoon, N.S. (Department of Electrical Engineering, Chungbuk National University)
  • Published : 2009.05.30
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Abstract

The domestic development status of Inductively Coupled Plasma (ICP) simulator which is based on fluid model is explained. As each part which composes the unified simulator, electron heating module, charged and neutral particle transport module, surface reaction module including a sheath model, and GUI (Graphic User Interface) with pre- and post-processors are described in order. Also, we present data base status of chemical reaction and physical collision, which has been applied to the recently developed simulator until now. Lastly, some future plans of development are suggested.

유체 모델을 기반으로 하는 국내의 유도 결합 플라즈마원의 시뮬레이터 개발 현황을 정리하였다. 전체 시뮬레이터를 구성하는 각 부분으로서, 전자 가열, 하전 입자 및 중성종 수송, sheath를 포함한 표면 반응, 그리고 GUI (Graphic User Interface) 및 전후처리기 등의 순으로 설명되었다. 현재까지 시뮬레이터에 구현된 화학 반응 데이터와 swarm 데이터도 정리하여 보았고, 앞으로의 개발 방향을 전망하여 보았다.

Keywords

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