반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

Simulation of outgassing effects of vacuum materials on vacuum characteristics

  • Kim, Hyung-Taek (Advanced Materials Major, Division of Advanced Materials and Safety Engineering, College of Engineering, University of Incheon) ;
  • Kim, Young-Suk (Advanced Materials Major, Division of Advanced Materials and Safety Engineering, College of Engineering, University of Incheon)
  • 발행 : 2009.03.31
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초록

The outgassing effects of selected vacuum materials on the vacuum characteristics were simulated by the $VacSim^{Multi}$ simulation tool. This investigation examined the feasibility of reliably simulating the outgassing characteristics of common vacuum chamber materials (aluminum, copper, stainless steel, nickel plated steel, Viton A). The optimum design factors for these vacuum systems were suggested based on the simulation results. The baking-out effects of the modeled systems and materials on the performance of the vacuum system were also analyzed. The simulation predicted that the overall outgassing effect was more significant in the TMP system than in the DP system and that the utilization of a booster pump has a greater effect on the evacuation time than on the ultimate pressure.

키워드

참고문헌

  1. J.M. Lafferty., Foundations of vacuum science andtechnology. John Wiley and Sons; 1998.
  2. Andrew Guthrie., Vacuum technology. John Wileyand Sons; 1963.
  3. John F., O’Hanlon. A user’s guide to vacuum technology.John Wiley and Sons; 1989.
  4. E. D. Erikson, T. G. Beat, D. D. Berger, B. A. Frazier.,Vacuum 1987; 37, 379.
  5. G. W. Schwarzinger., Vacuum 1992; 42, 681.
  6. V. Nemanie, J. Setina., Vacuum 1999; 53, 277-280 https://doi.org/10.1016/S0042-207X(98)00363-7
  7. V. Nemanie, T. Bogataj., Vacuum 1998; 50: 431-437 https://doi.org/10.1016/S0042-207X(98)00087-6
  8. R. J. Elsey. ,Vacuum 1975; 25, 347. https://doi.org/10.1016/0042-207X(75)91653-X
  9. Y. Hirohata, A. Mutoh, T. Yamashina, T. Kikuchi, N.Ohsako., Vacuum 1996; 47, 727-731 https://doi.org/10.1016/0042-207X(96)00057-7
  10. K. Jousten., Vacuum 1998; 49, 359. https://doi.org/10.1016/S0042-207X(98)00002-5
  11. F. Grangeon, C. Monnin, M. Mangeard, D. Paulin.,Vacuum 2004; 73, 243-248. https://doi.org/10.1016/j.vacuum.2003.12.049
  12. Technology Sources Ltd., User’s Guide of VacSimMultiSimulator (manual), 2001.
  13. Web source of $VacSim^{Multi}$ Simulation (http://www. softsim.com/vacsim.php).