반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

OLED Anode용 IZO 박막의 기판 온도에 따른 특성

The Performance of IZO Thin Film with Substrate Temperature for OLED Anode

  • 홍정수 (경원대학교 전기공학과) ;
  • 김경환 (경원대학교 전기공학과)
  • Hong, Jeong-Soo (Department of Electrical Engineering, Kyungwon University) ;
  • Kim, Kyung-Hwan (Department of Electrical Engineering, Kyungwon University)
  • 발행 : 2009.09.30
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초록

We investigated that electrical and optical the properties of IZO thin film for OLED anode application. The IZO thin film was the deposited on the glass substrate by facing targets system as a function of substrate temperature. As a result, the electrical and optical property of IZO thin film prepared with $150^{\circ}C$ was most excellent. To confirm the suitability of the IZO thin film for OLED anode, we evaluated the performance of OLED with IZO/TPD/Alq3/LiF/Al fabricated on IZO anode. Also, the performance of OLED fabricated on IZO anode showed the most excellent at $150^{\circ}C$ substrate temperature.

키워드

참고문헌

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