Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Fabrication of the CNT-FET biosensors with a double-gate structure

더블 게이트 구조의 탄소 나노 튜브 트랜지스터 바이오 센서의 제작

  • Cho, Byung-Hyun (School of Electrical Engineering and Computer Science, Kyungpook National University) ;
  • Lim, Byoung-Hyun (School of Electrical Engineering and Computer Science, Kyungpook National University) ;
  • Shin, Jang-Kyoo (School of Electrical Engineering and Computer Science, Kyungpook National University) ;
  • Choi, Sung-Wook (Korea Food Research Institute) ;
  • Chun, Hyang-Sook (Korea Food Research Institute)
  • 조병현 (경북대학교 전자전기컴퓨터학부) ;
  • 임병현 (경북대학교 전자전기컴퓨터학부) ;
  • 신장규 (경북대학교 전자전기컴퓨터학부) ;
  • 최성욱 (한국식품연구원) ;
  • 전향숙 (한국식품연구원)
  • Published : 2009.03.31
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Abstract

In this paper, we present the carbon nanotube field-effect transistor(CNT-FET) with a double-gate structure. A Carbon nanotube film was aligned by the Langmuir-Blodgett technique and $SiN_x$ was deposited to protect from water, oxygen, and other contaminants. We measured the electrical characteristics of the proposed device as the function of the $V_{BG}$, $V_{TG}$. From this result, we can confirm that proposed device might be employed as a biosensor.

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References

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