Journal of the Korean Vacuum Society (한국진공학회지)

The Korean Vacuum Society (한국진공학회)
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Optical Study of BaSm2Ti4O12 by Vacuum Ultra Violet Spectroscopic Ellipsometry

Vacuum Ultra Violet Spectroscopic Ellipsometry를 이용한 BaSm2Ti4O12의 광 특성 연구

  • Hwang, S.Y. (Nano-Optical Property Laboratory and Department of Physics, Kyung Hee University) ;
  • Yoon, J.J. (Nano-Optical Property Laboratory and Department of Physics, Kyung Hee University) ;
  • Jung, Y.W. (Nano-Optical Property Laboratory and Department of Physics, Kyung Hee University) ;
  • Byun, J.S. (Nano-Optical Property Laboratory and Department of Physics, Kyung Hee University) ;
  • Kim, Y.D. (Nano-Optical Property Laboratory and Department of Physics, Kyung Hee University) ;
  • Jeong, Y.H. (Korea Institute of Ceramic Engineering and Technology) ;
  • Nahm, S. (Department of Materials Science and Engineering, Korea University)
  • 황순용 (경희대학교 물리학과 및 나노광물성연구실) ;
  • 윤재진 (경희대학교 물리학과 및 나노광물성연구실) ;
  • 정용우 (경희대학교 물리학과 및 나노광물성연구실) ;
  • 변준석 (경희대학교 물리학과 및 나노광물성연구실) ;
  • 김영동 (경희대학교 물리학과 및 나노광물성연구실) ;
  • 정영훈 (한국요업기술원 전자부품 및 소재본부) ;
  • 남산 (고려대학교 신소재공학과 및 전자재료연구실)
  • Published : 2009.01.30
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Abstract

We performed a study on optical properties of $BaSm_2Ti_4O_{12}$ thin films by vacuum ultra violet spectroscopic ellipsometry in the $0.92{\sim}8.6\;eV$ energy range. For the analysis of the measured ellipsometric spectra, a 5-layer model was applied where optical property of the $BaSm_2Ti_4O_{12}$ layer was well represented by a Tauc-Lorentz dispersion function. Our analysis clearly showed new structure in high energy region at about 7.5 eV Consistent changes of refractive index & extinction coefficient of the $BaSm_2Ti_4O_{12}$ thin film by the growth and annealing temperatures were also confirmed.

본 연구에서는 분광타원분석법을 이용하여 최근 주목 받고 있는 microwave dielectric materials 인 $BaSm_2Ti_4O_{12}$ 박막의 광 특성을 $0.92{\sim}8.6\;eV$ 에너지 영역에서 분석하였다. 광역 에너지영역에서 측정이 가능한 Vacuum Ultra Violet spectroscopic ellipsometer를 사용하여 시료의 광 스펙트럼을 측정 하였으며, 측정된 스펙트럼으로부터 $BaSm_2Ti_4O_{12}$ 박막의 광 특성을 얻기 위하여 Tauc-Lorentz 분산 함수를 이용하였고, 고 에너지 영역대의 새로운 피크구조 (structure) 를 최초로 발견하였다.

Keywords

References

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