Characteristics of the Femto-second Pulsed Laser Ablation according to Feed Velocity on the Invar Alloy

펨토초 레이저의 이송속도에 따른 Invar 합금의 어블레이션 특성

  • 정일영 (인하대학교 기계공학과 대학원) ;
  • 강경호 (인하대학교 기계공학과 대학원) ;
  • 김재도 (인하대학교 기계공학과) ;
  • 손익부 (광주과학기술원 고등광기술연구소) ;
  • 노영철 (광주과학기술원 고등광기술연구소) ;
  • 이종민 (광주과학기술원 고등광기술연구소)
  • Published : 2009.03.01

Abstract

Femto-second laser ablation with the various feed velocities of the Invar alloy and the micro surface milling for the processing condition were studied. We used a regenerative amplified Ti:sapphire laser with a 1kHz repetition rate, 184fs pulse duration time and 785nm wavelength. Femto-second laser pulse was irradiated on the Invar alloy with the air blowing at the condition of various laser peak powers and feed velocities. An ablation characteristic according to feed velocity of the Invar alloy was appeared as the non-linear type at different zone of energy fluence. The micro surface milling of the Invar alloy using a mapping method was investigated. The optimal condition of micro surface milling was laser peak power of 22.8mW, feed velocity of 1 mm/s, beam gap of $1{\mu}m$. With the optimal processing condition, the fine rectangular shape without burr and thermal damage was achieved. Using the femto-second laser system, it demonstrates excellent tool for micro surface milling of the Invar alloy without heat effects and poor edge.

Keywords

References

  1. Venkatakrishnan, K., Tan, B. and Sivakumar, N. R., "Sub-micron ablation of metallic thin film by femtosecond pulse laser," Optics & Laser Technology,Vol. 34, No. 7, pp. 575-578, 2002 https://doi.org/10.1016/S0030-3992(02)00074-9
  2. Huang, H., Zheng, H. Y. and Lim, G. C., "Femtoseocnd laser machining characteristics of Nitinol," Applied Surface Science, Vol. 228, Issues 1- 4, pp. 201-206, 2004 https://doi.org/10.1016/j.apsusc.2004.01.018
  3. Semerok, A., Chaleard, C., Detalle, V., Lacour, J. L., Mauchien, P., Meynadier, P., Nouvellon, C., Salle, B., Palianov, P., Perdrix, M. and Petite, G., "Experimental investigations of laser ablation efficiency of puremetals with femto, pico and nanosecond pulses," Applied Surface Science, Vol. 138, No. 1, pp. 311- 314, 1999 https://doi.org/10.1016/S0169-4332(98)00411-5
  4. Ono, F., Hamarani, Y., Mukumoto, Y., Komatsu, S.,Ishikawa, N., Chimi, T., Iwase, A., Kambara, T., Muller, C. and Neumann, R., "Modification of Fe-NiInvar alloys by high-energy ion beams," Nuclear Instruments and Methods in Physics Research B, Vol. 206, pp. 295-298, 2003 https://doi.org/10.1016/S0168-583X(03)00748-1
  5. Kim, C., "Production of shadow-mask-improved technology," Journal of Material Processing Technology, Vol. 127, No. 3, pp. 409-418, 2002 https://doi.org/10.1016/S0924-0136(02)00435-1
  6. Richerzhagen, B., "Industrial applications of the water-jet guide laser," Industrial laser user, Vol. 28, pp. 28-30, 2002
  7. Lee, E. S., Lee, J. H., Kim, W. M. and Chun, Y. J., "Removal of micro burr by using Electrolyticdeburring," Journal of the Korean Society for Precision Engineering, Vol. 22, No. 9, pp. 20-26, 2005
  8. Venkatakrishnan, K., Tan, B. and Ngoi, B. K. A., "Femtosecond pulsed laser ablation of thin gold film," Optics & Laser Technology, Vol. 34, No. 3, pp. 199-202, 2002 https://doi.org/10.1016/S0030-3992(01)00110-4
  9. Li, X., Jia, T., Feng, D. and Xu, Z., "Ablation induced by femtosecond laser in sapphire," Applied Surface Science, Vol. 225, Issues 1-4, pp. 339-346, 2004 https://doi.org/10.1016/j.apsusc.2003.10.044
  10. Chung, I. Y., Kang, K. H., Kim, J. D., Sohn, I. B., Noh, Y. C. and Lee, J. M., 'Femtosecond Pulsed Laser Ablation of OLED Shadow Mask Invar Alloy,'Journal of the Korean Society for Precision Engineering, Vol. 24, No. 12, pp. 50-56, 2007
  11. Momma, C., Nolte, S., Chichkov, B. N., Alvensleben,F. V. and Tunnermann, A., 'Precise laser ablationwith ultrashort pulses,' Applied Surface Science, Vol.109-110, pp. 15-19, 1997 https://doi.org/10.1016/S0169-4332(96)00613-7
  12. Nolte, S., Momma, C., Jacobs, H., Tunnermann, A., Chichkov, B. N., Wellegehausen, B. and Welling, H., "Ablation of metals by ultrashort laser pulses," Journal of the Optical Society of America B, Vol. 14, Issue 10, pp. 2716-2722, 1997 https://doi.org/10.1364/JOSAB.14.002716
  13. Preuss, S., Demchuk, A. and Stuke, M., "Subpicosecond UV laser ablation of metals," Appl. Phys. A, Vol. 61, No. 1, pp. 33-37, 1995 https://doi.org/10.1007/BF01538207
  14. Chichkov, B. N., Momma, C., Nolte, S., von Alvensleben, F. and Tunnermann, A., "Femtosecond, picosecond and nanosecond laser ablation of solids," Appl. Phys. A, Vol. 63, No. 2, pp. 109-115, 1996 https://doi.org/10.1007/BF01567637