Journal of the Korean Society of Manufacturing Process Engineers (한국기계가공학회지)

The Korean Society of Manufacturing Process Engineers (한국기계가공학회)
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Characteristics of Pt thin films on WC for glass lens molding

유리렌즈 성형용 초경합금의 Pt 박막의 특성에 관한 연구

  • 박순섭 (한국생산기술연구원 호남권기술지원본부) ;
  • 이기용 (한국생산기술연구원 호남권기술지원본부) ;
  • 원종호 (충남대학교 기계.기계설계.메카트로닉스공학과)
  • Received : 2009.06.17
  • Accepted : 2009.09.21
  • Published : 2009.09.30
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Abstract

Pt thin films on Cr or Ti interlayer were deposited onto a tungsten carbide(WC) substrate by the ion beam assisted DC magnetron sputtering. The various atomic percent of Cr and Ti underneath of the Pt films were prepared to examine the total thin film characteristics. The microstructure and surface analysis of the specimen were conducted by using the SEM, XRD and AFM. Mechanical properties such as hardness and adhesion strength of Pt thin film also were examined. The interlayer of pure Ti was formed with 40 nm thickness while that of pure Cr was done with 50 nm as standard reference. The growth rate of either Cr or Ti thin film was almost same under the same deposition conditions. The SEM images showed that anisotropic grain of Pt thin films consisting of dense columnar structures irrespectively grew from the different target compositions. The values of hardness and adhesion strength of Cr/Pt thin film coated on a WC substrate were higher than those of Ti/Pt thin film.

Keywords

References

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