References
- Drexler K. E, Nanosystems: Molecular Machinery, Manufacturing, and Computation, New York: Wiley, 1992.
- Hierold C, From micro-to nanosystems: mechanicalsensors go nano, J. Micromech. Microeng. 14 S1-11,2004. https://doi.org/10.1088/0960-1317/14/9/001
- Iijima S, Helical microtubules of graphitic carbon, Nature 354 56-85, 1991. https://doi.org/10.1038/354056a0
- Mineta T, Kobayashi S, Watanabe Y, Kanauchi S, Nakagawa I, Suganuma E and Esashi M, Three-axis capacitive accelerometer with uniform axial sensitivities, J. Micromech. Microeng. 6 431-5, 1996. https://doi.org/10.1088/0960-1317/6/4/010
- Chau K. H-L, Lewis S R, Zhao Y, Howe R T, Bart S F and Marcheselli R G, An integrated force-balanced capacitive accelerometer for low-g applications, Sensors and Actuators A 54 472-6, 1996. https://doi.org/10.1016/S0924-4247(97)80006-4
- Baughman R H, Cui C, Zakhidov A A, Iqbal Z, Barisci J N, Spinks G M, Wallace G G, Mazzoldi A, De Rossi D, Rinzler A G, Jaschinski O, Roth S and Kertesz M, Carbon Nanotube Actuators, Science 284 1340-4, 1999. https://doi.org/10.1126/science.284.5418.1340
- Lee C L, Noy A, Swierkowski S P, Fisher K A and Woods B W, Carbon nanotube array based sensor, US Patent 6,946,851, 2005.
- Qian K, Chen T, Yan B, Lin Y, Xu D, Sun Z andCai B, Research on carbon nanotube array fieldemission pressure sensors, Electron. Lett. 41 824-5,2005. https://doi.org/10.1049/el:20051360
- Cumings J and Zettl A, Low-Friction Nanoscale Linear Bearing Realized from Multiwall Carbon Nanotubes, Science 289 602-4, 2000. https://doi.org/10.1126/science.289.5479.602
- Zheng Q and Jiang Q, Multiwalled Carbon Nanotubes as Gigahertz Oscillators, Phys. Rev. Lett. 88 045503, 2002. https://doi.org/10.1103/PhysRevLett.88.045503
- Hudlet S, Saint Jean M, Guthmann C and Berger J, Evaluation of the capacitive force between an atomic force microscopy tip and a metallic surface, Eur Phys. J. B 2 5-10, 1998. https://doi.org/10.1007/s100510050219
- Tersoff J,Empirical interatomic potential for silicon with improved elastic properties , Phys. Rev. B 38 9902-5. 1998. https://doi.org/10.1103/PhysRevB.38.9902
- Ulbricht H, Moos G and Hertel T, Interaction of C60 with Carbon Nanotubes and Graphite, Phys Rev. Lett. 90 095501, 2003. https://doi.org/10.1103/PhysRevLett.90.095501