• Title/Summary/Keyword: Nano-Accelerometer

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A Study on Nano-Accelerometer based on Carbon Nanotube (탄소나노튜브 기반의 나노-가속도계에 관한 연구)

  • Song, Young-Jin;Lee, Jun-Ha
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.10 no.1
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    • pp.91-95
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    • 2009
  • We investigated the characteristics of a capacitive nano-accelerometer based on carbon nanotube by means of classical molecular dynamics simulations. The position of the telescoping nanotube was controlled by the externally applied force and the feedback sensing was achieved from the capacitance change. Considering energy dissipation, the oscillation features of the nano-accelerometers were similar, regardless of their initial displacements. The capacitance variations, which were almost linearly proportional to the applied acceleration, were monitored within an error tolerance.

Fabrication of the accelerometer using the nano-gap trench etching (나노갭 트렌치 공정을 이용한 가속도센서 제작)

  • Kim, Hyeon-Cheol;Kwon, Hee-jun
    • The Journal of Korea Institute of Information, Electronics, and Communication Technology
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    • v.9 no.2
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    • pp.155-161
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    • 2016
  • This paper proposes a novel fabrication method for a capacitive type micro-accelerometer with uniform nano-gap using photo-assisted electro-chemical etching. The sensitivity of the accelerometer should be improved while the electrodes between the inertial mass and the sensing comb should be narrowed. In this paper the nano-gap trench structure is fabricated using the photo-assisted electrochemical etching method. The sensor was designed and analysed using ANSYS simulator. The characteristics of the etching were observed according to the dc bias, the light intensity, the composition of the solution, the temperature of the solution, and the pattern pitch variation. The optimum etching conditions were dc bias of 2V, Blue LED of 20mA, 49wt% HF:DMF:D.I.Water=1:20:10, the pattern pitch of $20{\mu}m$. Uniform trench structure with width of 344nm and depth of $11.627{\mu}m$ are formed using the optimum condition.

Development of the Measurement System for Evaluating Mechanical Properties of Nano-diamond Coated Film (나노 다이아몬드 코팅박막의 기계적 특성 평가를 위한 계측시스템의 개발)

  • Kweon, Hyun Kyu;Lee, So Jin;Kweon, Yong Min
    • Journal of the Semiconductor & Display Technology
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    • v.18 no.1
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    • pp.25-31
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    • 2019
  • In this study, a new adhesion evaluating equipment and data processing methods were developed to overcome some limitations of existing evaluating equipment. Nano-diamond coated tool is a specimen of experiment. When applying frictional force and shear force on the specimen by a rotating polishing pad, delamination occurs at a moment. During each experiment, the vibration, load, and torque is obtained by accelerometer, loadcell and torque s+ kpensor. Frictional force and coefficient of friction are obtained by calculating torque and load. Based on FFT transformation, acceleration is processed and analyzed. As a result, the moment of delamination and the load at that time can be detected by the new developed equipment and measurement system. Finally, we call this load as an Adhesion force.

A Study on MTL Device Design and Motion Tracking in Virtual Reality Environments

  • Oh, Am-Suk
    • Journal of information and communication convergence engineering
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    • v.17 no.3
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    • pp.205-212
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    • 2019
  • Motion tracking and localization devices are an important building block of motion tracking systems in a virtual reality (VR) environment. This study is about improving the accuracy of motion and location for enhancing user immersion in experience type VR environment to position tracking technique. In this study, we propose and test a design of such a device. The module data test of the attitude and heading reference system shows that the implementation with the MPU-9250 sensor is successful and adequate to be used with short operation time. We consider various sensor hardware dependencies of VR, and compare various correction methods and filtering methods to lower the motion to photon (MTP) time that user movement is fully reflected on the display using sensor devices. The Kalman filter is used to combine the accelerometer with the gyroscope in the sensing unit.

Development of Location/Safety Tracking System for Construction Site Workers by Using MEMS Sensors (MEMS 센서를 활용한 건설현장 작업자 위치/안전 정보 추적 시스템 개발)

  • Kim, Jin-Young;Ahn, Sung-Soo;Kang, Joon-Hee
    • 전자공학회논문지 IE
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    • v.49 no.1
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    • pp.12-17
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    • 2012
  • Fast development of ubiquitous technology prompted the broadening of the related application area. Application of ubiquitous techniques and system into the construction sites may give us many benefits. There are always a lot of hazard situations in construction sites, and the falling is known to have the high accident rate. To prevent the falling, there has been a lot of efforts including safety education and use of safety gears. In this study, we designed, fabricated and tested a system that can monitor the worker's safety and location informations in real time by using the wireless technology of TOA and RSSI. We used ATmegal28 that is popular in the industrial equipments as MCU and NanoPan 5357 module from Nanotron and CC2500 chipset from TI for radio circuits. We also used 3-axis accelerometer and pressure MEMS sensors to obtain the environmental information, and therefore to aquire the informations of the worker's movement and altitude. We used Labview software from National Instrument to monitor and control the system. We developed the system to send the warning alarms to the server operator and the workers when the workers in the danger zone did not wear the safety hook.