전력전자학회논문지 (The Transactions of the Korean Institute of Power Electronics)

  • 제14권1호
  • /
  • Pages.62-71
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  • 2009
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  • 1229-2214(pISSN)
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  • 2288-6281(eISSN)
전력전자학회 (The Korean Institute of Power Electronics)
권호 표지

마이크로 변위제어 시스템의 압전 액츄에이터 구동을 위한 스위칭 증폭기 성능 분석

Performance Evaluation of Switching Amplifier in Micro-positioning Systems with Piezoelectric Actuator

  • 박종후 (서울대 전기컴퓨터공학부) ;
  • 백종복 (서울대 전기컴퓨터공학부) ;
  • 조보형 (서울대 전기컴퓨터공학부) ;
  • 최성진 (삼성전자 영상디스플레이 사업부)
  • 발행 : 2009.02.20
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⟨ 이전 논문 다음 논문 ⟩

초록

본 논문에서는 마이크로 변위제어 시스템의 적층형 압전 액츄에이터를 위한 스위칭 증폭 구동회로의 구동방법을 제시하고 성능을 평가하였다. 이 증폭기는 압전 액츄에이터로부터 임의의 용량성 부하에 저장된 에너지를 효율적으로 회수할 수 있는 장점이 있다. 기존의 전압 되먹임 제어 방식은 100mHz의 정현파 기준치 추종시, 총 왜곡율이 -32dB (${\approx}2.5%$)로서, 액츄에이터의 전압과 변위 사이의 비선형적 관계로 인한 오차발생을 확인할 수 있었다. 이를 개선하기 위하여 전하 제어방식을 살펴보았는데, 기존의 직렬 커패시터를 연결하는 대신, 변위 기준치를 미분하고, 이를 출력전류와 비교하는 방식으로 개선하였다. 전하량 되먹임 제어 적용시 변위의 왜곡률은 약 -52dB (${\approx}0.25%$)로서 선형성이 매우 우수한 특성을 보임을 알 수 있다. 마지막으로 살펴본 직접 변위 제어 방식은 구현상의 복잡성으로 성능의 한계가 존재함을 알 수 있다.

In this paper, an improved drive method of piezoelectric PZT stack actuator for micro-positioning system is proposed and the performances are evaluated. This type of amplifier is based on switching technology efficiently handling the arbitrary regenerative energy from the piezoelectric actuator. The conventional voltage-feedback control method has the THD of -32dB (${\approx}2.5%$) with 100mHz sinusoidal reference, which means that the positioning performance in linearity degrades due to the hysteretic relationship between actuator voltage and the displacement. This paper proposed an improved charge-controlling method, which utilizes differential information of charge reference instead of integrating the actuator's current. The current waveform has THD under -40dBV (=1%) and the displacement waveform nearly -52dB (${\approx}0.25%$), which means that the positioning performance is very excellent. Finally, another method of the displacement feedback control has better performance than the voltage method, however there exists a limitation in performance of the system.

키워드

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