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미세액적의 자기정렬 기법을 포함한 패터닝 공법에 대한 해석적인 연구

A Numerical Study on Patterning Process Including a Self-Alignment Technique of a Microdroplet

  • 발행 : 2009.01.01

초록

Numerical simulation is performed for microdroplet deposition on a pre-patterned micro-structure. The liquid-air interface is tracked by a level-set method, which is improved by incorporating a sharp-interface modeling technique for accurately enforcing the matching conditions at the liquid-gas interface and the no-slip condition at the fluid-solid interface. The method is further extended to treat the contact angle condition at an immersed solid surface. The present computation of a patterning process using microdroplet ejection demonstrates that the multiphase characteristics between the liquid-gas-solid phases can be used to improve the patterning accuracy.

키워드

참고문헌

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피인용 문헌

  1. A Numerical Study on Droplet Deposition in a Micro-Groove vol.33, pp.10, 2009, https://doi.org/10.3795/KSME-B.2009.33.10.789