Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Characterization of AFM machining mode and Acoustic Emission monitoring

AFM 가공 모드 분석 및 AE 모니터링

  • Ahn, Byoung-Woon (Department of Mechanical Engineering, hanyang Univ.) ;
  • Lee, Seoung-Hwan (Department of Mechanical design & Mechatronics System, hanyang Univ.)
  • 안병운 (한양대학교 기계공학과) ;
  • 이성환 (한양대학교 대학원 메카트로닉스시스템공학과)
  • Published : 2008.10.01
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Abstract

This study aims to obtain machining characteristics during AFM (Atomic force Microscope) machining of silicon wafers and to monitor the machining states using acoustic emission. As in micro scale machining, two distinct regimes of deformation, i. e. ploughing regime and cutting regime were observed. First, the transition between the two regimes are investigated by analyzing the "pile-up" during machining. As far as in process monitoring is concerned, in the ploughing repime, no chips have been formed and related AE RMS values are relatively low, In the mean time, in the cutting regime, the RMS values are significantly higher than the ploughing regime, with apparent chip formation. From the results, we found out that the proposed scheme can be used for the monitoring of nanomachining, especially for the characterization of nanocutting mode transition.

Keywords

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