한국레이저가공학회지 (Laser Solutions)

한국레이저가공학회 (Korean Society of Laser Processing)
권호 표지

공정 모니터링 광학모듈이 장착된 UV 레이저 미세가공 플랫폼 제작

Fabrication of a UV laser micromachining platform with process-monitoring optical modules

  • Sohn, H. (Korea Institute of Machinery and Materials) ;
  • Lee, J.H. (Korea Institute of Machinery and Materials) ;
  • Jeong, Y.W. (Korea Institute of Machinery and Materials) ;
  • Kim, S.I. (Institute for Advanced Engineering) ;
  • Hahn, J.W. (Yonsei university)
  • 발행 : 2008.06.30
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

Laser micromachining has increasingly been adopted in various advanced industries where the high-precision machining of large-area, high-density and multi-layered components is in a strong demand. To effectively meet the requirements, the laser micromachining process must be carefully monitored. In order to facilitate the development of a new laser micromachining process and/or a new system, we have fabricated a UV laser micromachining platform that is equipped with optical modules for monitoring the process online. They include a laser power stabilizing module, a module for laser-induced breakdown spectroscopy, and an auto-focusing module.

키워드