• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.11a
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• pp.102-105
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• 2000

A simple digital control system has been developed for the frequency stabilization of an internal mirror He-Ne laser. The system is based on one chip microprocessor with embedded Basic interpreter. To stabilize the laser output frequency, the signal such as power difference or beat frequency between two modes is supplied and processed by a microprocessor, and control signal is fed to the heating coil would round the laser tube for adjusting the spacing of the laser cavity mirror. Newly developed frequency stabilization system is totally digitized. The system and the frequency stability performance are briefly described.

• KIEE International Transactions on Electrophysics and Applications
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• v.4C no.3
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• pp.96-100
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• 2004

The Nd： YAG laser is commonly used throughout many fields such as accurate material processing, IC marking, semiconductor annealing, medical operation devices, etc., due to the fact that it has good thermal and mechanical properties and is easy to maintain. In materials processing, it is essential to vary the laser power density for specific materials. The laser power density can be mainly controlled by the current pulse width and pulse repetition rate. It is important to control the laser energy in those fields using a pulsed laser. In this paper we propose the constant-frequency current resonant half-bridge converter and monitoring of capacitor charging voltage. This laser power supply is designed and fabricated to have less switching loss, compact size, isolation with primary and secondary transformers, and detection of capacitor charging voltage. Also, the output stabilization characteristics of this Nd： YAG laser system are investigated. The test results are described as a function of laser output energy and flashlamp arc discharging constant. At the energy storage capacitor charges constant voltage, the laser output power is 2.3％ error range in 600[V].

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.53 no.11
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• pp.583-588
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• 2004

We stabilized the frequency and power of a high voltage excited CW CO2 laser on the peak of the Doppler broadened gain curve using the photoacoustic effect generated from the laser itself. The photoacoustic signal is directly coupled from an radio frequency discharge chamber via a capacitor microphone into a detector and a lock-in stabilizer. The frequency stability is estimated to be better then 1.2×10/sup -7/ at the transition P(20) line. The stabilized output power variation was reduced to from 77 % to 3.3 %.

• Korean Journal of Optics and Photonics
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• v.15 no.4
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• pp.337-342
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• 2004

Laser optical power stabilization of a radio frequency excited $CO_2$ slab laser using the opto-Hertzian effect generated from the laser itself is achieved on the peak of the Doppler broadened gain curve. The opto-Hertzian signal was generated by a modulation of the optical flux circulating inside the laser cavity from a variation in the cavity length caused by the vibrations of the PZT. The opto-Hertzian signal is directly coupled from a RE discharge chamber via a loop antenna into a detector and applied to a lock-in stabilizer as an reference signal. The power stability of an RF excited slab laser is estimated to be better then 0.2%.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.11a
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• pp.753-754
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• 2008

• Laser Solutions
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• v.9 no.2
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• pp.17-22
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• 2006

In this study, PID control method was applied to decrease the power fluctuation of the pulse laser which is one of the major processing variables in laser machining process. To stabilize the power fluctuation of the pulse laser, we averaged 10 pulse outputs of Nd:YAG laser operating in 10Hz using boxcar averager, and with taking this averaged output as an input signal, we conducted PID control using optical attenuator which is consisted of half wave plate attached on the stepping motor and polarizer. When PID control was not enabled, the power fluctuation was 4.71% and with PID control, the power fluctuation was 1.86% for 2 hours and 1 hour respectively. As a result, we stabilized the power fluctuation of the pulse laser by 60.5%

• Proceedings of the Korean Society of Laser Processing Conference
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• 2006.06a
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• pp.89-96
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• 2006

In this study, PID control method was applied to decrease the power fluctuation of the pulse laser which is one of the major processing variables in laser machining process. To stabilize the power fluctuation of the pulse laser, we averaged 10 pulse outputs of Nd:YAG laser operating in 10Hz using boxcar averager, and with taking this averaged output as an input signal, we conducted PID control using optical attenuator which is consisted of half wave plate attached on the stepping motor and polarizer. When PID control was not enabled, the power fluctuation was 4.71% and with PID control, the power fluctuation was 1.86% for 2 hours and 1 hour respectively. As a result, we stabilized the power fluctuation of the pulse laser by 60.5%

• Journal of the Optical Society of Korea
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• v.2 no.1
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• pp.1-4
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• 1998

The second harmonic light of an 842 nm diode laser was generated from a KNbO3 crystal in an external ring resonator. The power of the second harmonic light was about 0.8 mV at an input fundamental power of 87 mW. The laser frequency was stabilized to the resonance frequency of the ring resonator, and the frequency fluctuation was measured as about 3 MHz.

• Laser Solutions
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• v.11 no.2
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• pp.33-38
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• 2008

Laser micromachining has increasingly been adopted in various advanced industries where the high-precision machining of large-area, high-density and multi-layered components is in a strong demand. To effectively meet the requirements, the laser micromachining process must be carefully monitored. In order to facilitate the development of a new laser micromachining process and/or a new system, we have fabricated a UV laser micromachining platform that is equipped with optical modules for monitoring the process online. They include a laser power stabilizing module, a module for laser-induced breakdown spectroscopy, and an auto-focusing module.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.2
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• pp.34-39
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• 2010

In order to achieve and maintain dimensional accuracy in laser micro-machining, dominant parameters such as laser power and laser focus position need to be monitored and controlled real time. Also, in order to selectively machine multi-layered materials, the material being presently machined need to be recognized. This paper presents an auto-focusing (AF) module to keep laser focus on a large-area surface; a real-time laser power stabilizing module based on optical attenuation; and a laser-induced breakdown spectroscopy (LIBS) module. With these monitoring modules, position error in laser focus on a 4" silicon wafer was kept below $4{\mu}m$, initially $51{\mu}m$, and laser power stability of a UV laser source was improved from 1.6% to 0.3%. Also, the material transition from polyimide to copper in machining of FCCL (flexible copper clad laminate) was successfully observed.