Journal of the Korean Vacuum Society (한국진공학회지)

The Korean Vacuum Society (한국진공학회)
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How to reduce the power consumption of vacuum pump in semiconductor industry

반도체 산업에 있어서의 진공 펌프 소비 전력 절감 방안

  • 주장헌 (에드워드코리아주식회사, 진공기술연구소) ;
  • 김효배 (에드워드코리아주식회사, 진공기술연구소) ;
  • 김중조 (에드워드코리아주식회사, 진공기술연구소)
  • Published : 2008.07.30
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Abstract

For the semiconductor manufacturing processes, so many vacuum systems are needed with large power consumption for vacuum pumps. Semiconductor device manufacturing makers are concerned about the power consumption and have to address this because it is related with the environmental issues. So many solutions including the design and the control of them by vacuum pump manufacturers to reduce the power consumption of vacuum pump are proposed. However, how to use vacuum pumps by users and the conditions for vacuum pump to be used are also very important to reduce the power consumption. In this article, how to reduce the power consumption of vacuum pumps is explained briefly and what the impact of semiconductor technology trend on the power consumption is considered very briefly.

반도체 소자 제조 공정을 진행하기 위해서는 수많은 진공 시스템이 사용되어야 하고 이로 인하여 많은 소비전력을 필요로 한다. 소비전력 문제는 환경 문제와도 연관되기 때문에 반도체 소자 제조업체들 입장에서는 깊은 관심을 가지고 해결해야 할 사항으로 여러 가지 방안들이 제안되고 있다. 진공 펌프 제조업체들 입장에서는 진공 펌프의 설계/제작에 있어 소비 전력절감을 감안하게 되지만, 반도체 팹(fab)내부에서 소비 전력을 줄이기 위해서는 진공 펌프를 사용하는 사용자의 사용 방법 및 환경도 매우 중요하다. 본 연구에서는 반도체 소자 제조 공정에 사용되는 진공 펌프의 소비 전력을 줄이는 여러 가지 방법들에 대해 간략하게 설명하고 반도체 산업의 기술 발전 방향이 진공 펌프 소비 전력에 미치는 영향을 살펴보고자 한다.

Keywords

References

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