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Ion beam assisted DC magnetron sputtering에 대한 렌즈 유리 성형용 WC 합금의 Ir-Re 박막 특성

Characteristics of Ir-Re Thin Films on WC for Lens Glass Molding by Ion Beam Assisted DC Magnetron Sputtering

  • 발행 : 2008.06.30

초록

Ir-Re thin films with Ti interlayer were deposited onto the tungsten carbide substrate by ion beam assisted DC magnetron sputtering. The Ir-Re films were prepared with targets of having two atomic percent of 7:3 and 5:5. The microstructure and surface analysis of the specimen were conducted by using SEM, XRD and AFM. Mechanical properties such as hardness and adhesion strength of Ir-Re thin film also were examined. The interlayer of pure titanium was formed with 100 nm thickness. The film growth of Ir-30at.%Re was faster than that of Ir-50at.%Re in the same deposition conditions. Ir-Re thin films consisted of dense and columnar structure irrespective of the different target compositions. The values of hardness and adhesion strength of Ir-30at.%Re thin film coated on WC substrate were higher than those of Ir-50at.%Re thin film.

키워드

참고문헌

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피인용 문헌

  1. Analysis of Characteristics of DLC Coating Thin Film in Tungsten Carbide for Production of Medical Thermal-Infrared Lenses vol.15, pp.6, 2014, https://doi.org/10.4313/TEEM.2014.15.6.344
  2. Characteristic of DLC Thin Film Fabricated by FVAS Method on Tungsten Carbide vol.24, pp.10, 2011, https://doi.org/10.4313/JKEM.2011.24.10.812