The Transactions of The Korean Institute of Electrical Engineers (전기학회논문지)

The Korean Institute of Electrical Engineers (대한전기학회)
권호 표지

Adaptive Error Compensation of Heterodyne Laser Interferometer using DFNN

DFNN을 이용한 헤테로다인 레이저 간섭계의 적응형 오차 보정

  • 허건행 (성균관대학교 전기전자공학부) ;
  • 이우람 (성균관대학교 전기전자공학부) ;
  • 유관호 (성균관대학교 정보통신공학부)
  • Published : 2008.06.01
Download PDF
⟨ Previous Next ⟩

Abstract

As an ultra-precision measurement system the heterodyne laser interferometer plays an important role in semiconductor industry. However the errors of environment and nonlinearity which are caused by air refraction and frequency-mixing separately reduce the accuracy of displacement measurement. In this paper we propose a DFNN(data fusion and neural network) method for error compensation. As a hybrid method of data fusion and neural network, DFNN method reduces the environmental and nonlinear error simultaneously. The effectiveness of the proposed error compensation method is proved through experimental results.

Keywords

References

  1. H.C. Yeh, W.T. Ni, and S.S. Pan, "Digital closed-loop nanopositioning using rectilinear flexure stage and laser interferometer", Control Engineerig Practice, Vol. 13, pp. 559-566, (2005) https://doi.org/10.1016/j.conengprac.2004.04.019
  2. W.T. Estler, "High-accuracy displacement interferometry in air", Applied Optics, Vol. 24, No. 6, pp. 808-815, (1985) https://doi.org/10.1364/AO.24.000808
  3. J. Lawall and E. Kessler, "Michelson interferometry with 10 pm accuracy", Review of Scientific Instruments, Vol. 71, pp. 2669-2676, (2000) https://doi.org/10.1063/1.1150715
  4. N. Bobroff, "Residual errors in laser interferometer from air turbulence and nonlinearity", Applied Optics Vol. 26, pp. 2676-2682, (1987) https://doi.org/10.1364/AO.26.002676
  5. T.J. Park, H.S. Choi, C.S. Han and Y.W. Lee, "Real-time precision displacement measurement interferometer using the robust discrete time Kalman filter", Optics & Laser Technology, Vol. 37, pp. 229-234, (2005) https://doi.org/10.1016/j.optlastec.2004.03.009
  6. C.M. Wu and R.D. Deslattes, "Analytical modeling of the periodic nonlinearity in heterodyne interferometry", Applied Optics, Vol. 37, No. 28, pp. 6696-6700, (1998) https://doi.org/10.1364/AO.37.006696
  7. T.B. Eom, T.Y Choi and K.H. Lee, "A simple method for the compensation of the nonlinearity in the heterodyne interferometer", Measurement Science & Technology, Vol. 13, pp. 222-225, (2002) https://doi.org/10.1088/0957-0233/13/2/313