Sub-micron Control Algorithm for Grinding and Polishing Aspherical Surface

  • Kim, Hyung-Tae (Mechatronics Team, Korea Institute of Industrial Technology) ;
  • Yang, Hae-Jeong (Dept. of Mechanical Design Engineering, Korea Poly-technique University) ;
  • Kim, Sung-Chul (Research Center, AM Technology)
  • Published : 2008.06.30

Abstract

A position control method for interpolating aspherical grinding and polishing tool path was reviewed and experimented in a nano precision machine. The position-base algorithm was reformed from the time-base algorithm, proposed in the previous study. The characteristics of the algorithm were in the velocity control loop with position feedback. The aspherical surface was divided by an interval at which each velocity and acceleration were calculated. The theoretical velocity was corrected by position error during processing. In the experiment, a machine was constructed and nano-scale linear encoders were installed at each axis. Relation between process parameters and the variation of position error was monitored and discussed. The best result from optimized parameters showed that the accuracy was 150nm and improved from the previous report.

Keywords

References

  1. M. Sekine, N. Sugimoto, and H. Wakatsuk, "Press-formed aspherical micro lense made of Bismuth based glass with high refractive index and transparency," Proc. of Optical Fiber Communication Conf., vol. 1, pp. 91-106, 2004
  2. W. C. Chen and F. G. Tseng, "Tunable microaspherical lense manipulated by 2D electoro static force," Proc. of Int. Conf. on Solid-state Sensors, Actuators and Microsystems, pp. 376- 379, 2005
  3. L. Zhang, T. S. Kuriyagawa, T. Y. Kaku, and J. Zhao, "Investigation into electrorheological fluid-assisted polishing," International Journal of Machine Tools & Manufacture, vol. 45, no. 12-13, pp. 1461-1467, May 2005 https://doi.org/10.1016/j.ijmachtools.2005.01.021
  4. Y. C. Lee, C. M. Chen, and C. Y. Wu, "A new excimer laser micromachining method for axially symmetric 3D microstructures with continuous surface profiles," Sensors and Actuators A (physical), vol. 117, no. 12-13, pp. 117-355, 2005
  5. V. C. Venkatesh, S. Izman, S. Sharif, T. Y. Mon, and M. Konneh, "Precision micro-machining of silicon and glass," Proc. of IEEE Int. Conf. on Industrial Application and Technology, pp. 1146-1151, 2002
  6. C. Y. Jhuang, J. Y. Chen, and T. D. Cheng, "A design of scanning system based on aspherical lens," Proc. of the Second Asia and Pacific Rim Symp. on Biophotonics, pp. 148-149, 2004
  7. A. Y. Dyomin, S. M. Marchuk, and V. I. Reizlin, "Simulating a non-spherical surface profile," Proc. of the 9th Russian-Korean Int. Symp. on Science and Technology, pp. 592-593, 2005
  8. M. Y. Yang and H. C. Lee, "Local material removal mechanism considering curvature effect in the polishing process of the small aspherical lens die," Journal of Material Processing Technology, vol. 116, no. 2-3, pp. 298-304, 2001 https://doi.org/10.1016/S0924-0136(01)01055-X
  9. H. T. Kim and H. J. Yang, "Semi-continuous interpolation algorithm for aspherical surface grinding," Proc. of IEEE Region 10 Conf., pp. 1- 5, 2005
  10. H. T. Kim, H. J. Yang, and S. C. Kim, "A study on the control method for the tool path of asherical surface grinding and polishing," Journal of the Korean Society of Precision Engineering, vol. 23, no. 1, pp. 113-119, 2006
  11. R. R. Shannon, The Art and Science of Optical Design, Cambridge, United Kingdom, 1997.
  12. W. Tai, R. Schwarte, and H. G. Heinol, "Optimisation of the light transmission and irradiance distribution of an aspherical lens for 3-D time-of-flight sensors," Optics & Laser Technology, vol. 32, no. 2, pp. 111-116, 2000 https://doi.org/10.1016/S0030-3992(00)00025-6
  13. M. Hill, M. Jung, and J. W. MacBride, "Separation of form from orientation in 3D measurements of aspheric surfaces with no datum," International Journal of Machine Tools & Manufacture, vol. 42, no. 4, pp. 456-466, 2002
  14. H. T. Kim, H. J. Yang, and S. C. Kim, "Nano control algorithm for grinding and polishing aspherical surface," Proc. of the IEEE Conf. Emerging Technologies and Factory Automation, pp. 113-119, 2006
  15. E. S. Lee and S. Y. Baek, "A study on optimum grinding factors for aspheric convex surface microlens using design of experiments," International Journal of Machine Tools & Manufacture, vol. 47, no. 3-4, pp. 509-520, 2007 https://doi.org/10.1016/j.ijmachtools.2006.06.007