제어로봇시스템학회논문지 (Journal of Institute of Control, Robotics and Systems)

  • 제14권5호
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  • Pages.444-452
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  • 2008
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  • 1976-5622(pISSN)
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  • 2233-4335(eISSN)
제어로봇시스템학회 (Institute of Control, Robotics and Systems)
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패턴이 있는 TFT-LCD 패널의 결함검사를 위하여 근접패턴비교와 경계확장 알고리즘을 이용한 자동광학검사기(AOI) 개발

Development of AOI(Automatic Optical Inspection) System for Defect Inspection of Patterned TFT-LCD Panels Using Adjacent Pattern Comparison and Border Expansion Algorithms

  • 강성범 ((주)에스엔유프리시젼) ;
  • 이명선 (서울대학교 기계항공공학부) ;
  • 박희재 (서울대학교 기계항공공학부)
  • 발행 : 2008.05.01
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초록

This paper presents an overall image processing approach of defect inspection of patterned TFT-LCD panels for the real manufacturing process. A prototype of AOI(Automatic Optical Inspection) system which is composed of air floating stage and multi line scan cameras is developed. Adjacent pattern comparison algorithm is enhanced and used for pattern elimination to extract defects in the patterned image of TFT-LCD panels. New region merging algorithm which is based on border expansion is proposed to identify defects from the pattern eliminated defect image. Experimental results show that a developed AOI system has acceptable performance and the proposed algorithm reduces environmental effects and processing time effectively for applying to the real manufacturing process.

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참고문헌

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